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Off-plane electrostatic driver and production method thereof

An electrostatic drive, out-of-plane technology, applied in the direction of piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, circuits, etc. Drive application range and other issues to achieve the effect of improving reliability, reducing driving force and driving voltage, and realizing mass production

Inactive Publication Date: 2013-09-11
PEKING UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At the same time, due to the influence of the electrostatic pull-in effect, a large driving voltage will cause the reliability of the driver to decrease, and the impact resistance is poor
The above factors limit the range of application of this type of driver

Method used

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  • Off-plane electrostatic driver and production method thereof
  • Off-plane electrostatic driver and production method thereof
  • Off-plane electrostatic driver and production method thereof

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Embodiment Construction

[0020] The present invention will be described in detail below in conjunction with the accompanying drawings and embodiments. However, the following examples are only limited to explain the present invention, and the protection scope of the present invention should include the entire content of the claims.

[0021] figure 1 Shown is a schematic diagram of the planar structure of the embodiment of the present invention, figure 2 Shown is a schematic diagram of the three-dimensional structure of the embodiment of the present invention. The size of this embodiment is 3000 μm×3000 μm, which is just for example, and the present invention is not limited thereto. The structure of the MEMS comb-tooth off-plane electrostatic driver in this embodiment includes a substrate (not shown in the figure), a movable electrode 1, a fixed electrode 2, a drive output part 3, an anchor point 4, a signal lead-out pad (not shown in the figure) and Twist composite beam 5.

[0022] The movable ele...

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PUM

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Abstract

The invention relates to an MEMS (Micro-electromechanical Systems) comb-finger off-plane electrostatic driver structure with low driving voltage and a production method thereof. The driver structure comprises a fixed electrode, a movable electrode, an anchor, a combined torsion beam, a driving output part and a signal lead out bonding pad, wherein the fixed electrode is a comb-finger electrode fixed on a substrate; the movable electrode is a comb-finger electrode connected to the driving output part; and the combined torsion beam comprises two groups of foldable torsion beams and one bracket cross beam, and is suspended and fixed on the substrate. According to the driver structure, angular displacement is converted into linear displacement through the adoption of the combined torsion beam, so that not only can large-stroke off-plane motion under low driving voltage be achieved, but also the influence of the electrostatic pull-in effect can be refrained, and the reliability of the driver can be improved. The off-plane electrostatic driver and the production method have the advantages that the technological process is simple and is compatible with various types of MEMS device technologies, and integration with other micro-optic-electro-mechanical systems can be achieved.

Description

technical field [0001] The invention relates to the field of microelectromechanical systems (Microelectromechanical Systems, MEMS), in particular to a low driving voltage out-of-plane electrostatic driver based on comb-tooth driving. Background technique [0002] Due to the advantages of small size, fast response and high reliability, electrostatic actuators realized by MEMS technology have been widely used and developed in the fields of adaptive optics such as micro-deformable mirrors. Among them, the comb-tooth electrostatic driver, especially the comb-tooth electrostatic driver that realizes out-of-plane motion, has the advantages of bidirectional drive, large driving stroke, online detection and online control, and easy integration, and has become one of the important MEMS electrostatic drives. It has been widely used in micro-deformable mirrors, scanning micro-lenses, optical phase shifters and other fields. The comb-tooth type electrostatic drive needs to generate the...

Claims

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Application Information

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IPC IPC(8): B81B3/00B81C1/00
Inventor 王建坤杨振川闫桂珍
Owner PEKING UNIV
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