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Secondary feeding device and secondary feeding method therefor

A technology of secondary feeding and feeding, which is applied in chemical instruments and methods, self-melting liquid pulling method, crystal growth, etc. The effect of the feeding amount

Inactive Publication Date: 2013-09-25
保定流云精密机械制造有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to provide a secondary feeding device and its charging method to solve the problem in the prior art that the cost of pulling a single crystal rod is relatively high due to the inability to carry out secondary feeding to the single crystal furnace

Method used

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  • Secondary feeding device and secondary feeding method therefor
  • Secondary feeding device and secondary feeding method therefor

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Embodiment Construction

[0020] The embodiments of the present invention will be described in detail below with reference to the accompanying drawings, but the present invention can be implemented in many different ways defined and covered by the claims.

[0021] Explanation of terms:

[0022] Single crystal furnace: in an inert gas environment, a graphite resistance heater is used to melt the silicon material and grow a dislocation-free single crystal by the Czochralski method.

[0023] Secondary feeding: refers to the silicon material in the quartz crucible of the single crystal furnace after being filled and melted once, and then the silicon material is added to the interior once.

[0024] Single crystal side skin material: the silicon material at the edge of the single crystal rod cut during the cutting process of the single crystal rod.

[0025] see figure 1 and figure 2 As shown, according to an embodiment of the present invention, the secondary feeding device includes a secondary feeder 20 ...

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Abstract

The invention provides a secondary feeding device and a secondary feeding method therefor. The secondary feeding device comprises a secondary feeder and a driving mechanism. The secondary feeder comprises a connection part and a hoisting part for hoisting a material needing to be fed. Rightly above a quartz crucible in a single crystal furnace, the secondary feeder can move up and down. The driving mechanism comprises a connection assembly connected to the connection part of the secondary feeder and a driving part for driving the secondary feeder to move. The secondary feeding device and the secondary feeding method therefor can improve a yield of single crystal rods drawn by the single crystal furnace through one step and reduce an enterprise production cost.

Description

technical field [0001] The present invention relates to the field of Czochralski single crystal, more specifically, to a secondary feeding device and a feeding method thereof. Background technique [0002] The operation process of the single crystal furnace is furnace cleaning—>charging—>vacuumizing—>melting material—>stabilization—>seeding—>shoulder setting—>equal diameter—>finishing— —>Stop the furnace, due to the characteristics of the shape and size of the quartz crucible and the silicon material, when charging at one time, because the volume of the quartz crucible is fixed and the silicon material to be added is solid, generally only 130kg of silicon material can be accommodated, and it is difficult to accommodate more Silicon materials limit the feeding amount of the single crystal furnace, making the production cost of the single crystal furnace relatively high. Contents of the invention [0003] The purpose of the present invention is to...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/02
Inventor 白剑铭
Owner 保定流云精密机械制造有限公司
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