A high-speed intelligent detector for substrate thickness, specification and squareness

Abstract

The invention relates to a high-speed intelligent detector for the thickness, the specification and the squareness of a substrate. The detector comprises a rack, a platform plate fixed on the rack, transparent substrate glass fixed on the platform plate and a line light source arranged below the substrate glass. An XYZ axis rectangular coordinate robot is installed on the platform plate, a synchronizing mechanism is installed on the Z axis of the robot, the line light source is installed on the synchronizing mechanism, a set of optical system and a set of high-precision laser measurement system are arranged on the Z axis, and the XYZ axis rectangular coordinate robot is connected with a PLC controller. The PLC controller is connected with an industrial personal computer and a sound-light alarm system on the platform plate, the industrial personal computer is connected with an LCD displayer, and a substrate supporting device is arranged beside the substrate glass. The high-speed intelligent detector integrates a plurality of detection functions, can carry out rapid intelligent efficient detection on the thickness, formwork side length and size, the squareness and other specifications of the substrate, and is simple in structure, low in cost, convenient to operate, high in compatibility, and high in detection speed and detection precision.

Description

technical field [0001] The invention relates to a high-speed intelligent detector for substrate thickness, specification and squareness. Background technique [0002] At present, the inspection of substrate specifications in China, including the inspection of substrate thickness, template side length and squareness, is generally carried out by manual measurement with a ruler. This kind of contact inspection is likely to cause contamination of the substrate, and the method of artificial naked eyes is used. Observation shows that the labor intensity is high, the workers are also very tired and easy to miss inspection, the controllability of this method is very poor, the final data results are not accurate enough, the reliability is poor, the manual method is inefficient, and the thickness data cannot be measured. However, although there are substrate specification testing instruments in foreign countries, the structure is complex, the cost is expensive, and the testing time is...

AI Technical Summary

Problems solved by technology

[0002] At present, the inspection of substrate specifications in China, including the inspection of substrate thickness, template side length and squareness, is generally carried out by manual measurement with a ruler. This kind of contact inspection is likely to cause contamination of the substrate, and the method of artificial naked eyes is used. Observation shows that the labor intensity is high, the workers are also very tired and easy to miss inspections, the controllability of this method is very poor, the final data results are not accurate enough, the reliability is poor, the efficiency of the manual method is low, and the thickness data cannot be measured

However, although there are substrate specification testing instruments in foreign countries, the structure is complex, the cost is expensive, and the test time is relatively long and the test efficiency is low.

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