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Manufacturing method of NO2 gas sensor used for room temperature detection

A technology of gas sensor and manufacturing method, which is applied in the direction of instruments, measuring devices, scientific instruments, etc., can solve the problems of uneven distribution, poor adhesion between sensitive materials and flexible substrates, etc., and achieve the effect of uniform distribution and enhanced adhesion

Inactive Publication Date: 2013-10-02
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Abstract
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Problems solved by technology

[0006] The object of the invention is to provide a NO 2 Gas sensor method to solve the problem of poor adhesion and uneven distribution between sensitive materials and flexible substrates, and achieve the purpose of firm bonding and uniform distribution between sensitive materials and flexible substrates

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  • Manufacturing method of NO2 gas sensor used for room temperature detection
  • Manufacturing method of NO2 gas sensor used for room temperature detection
  • Manufacturing method of NO2 gas sensor used for room temperature detection

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Embodiment Construction

[0028] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0029] The technical idea adopted in the present invention is as follows: CO undergoes disproportionation reaction under high pressure to generate carbon nanotubes, mixes carbon nanotubes with organometallic solution 2-hexyl stannous hexanoate, and ultrasonically oscillates for 1.5 to 2.5 hours, preferably for 2 hours. Hours, a uniformly mixed suspension was obtained, and then the suspension was coated on SiO by spin coating, drop coating, dip coating or screen printing. 2 On the substrate, dry and evaporate the solvent in the coating, and then calcinate at high temperature for 0.5 hours to 4 hours to obtain composite SWCNTs / SnO 2 Sensitive film, and use HF acid to etch off the lower layer of SiO 2 , separate the sensiti...

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Abstract

The invention discloses a manufacturing method of a NO2 gas sensor used for room temperature detection. The manufacturing method of the NO2 gas sensor used for room temperature detection comprises the following steps of: preparing a metal electrode on the surface of a flexible substrate, making a SWCNTs / SnO2 sensitive film, and bonding the SWCNTs / SnO2 sensitive film with the surface of the flexible substrate, provided with the metal electrode, so as to form the NO2 gas sensor used for room temperature detection. By adopting the manufacturing method of the NO2 gas sensor used for room temperature detection, the problems that adhesion between a sensitive material and the flexible substrate is poor and distribution is not uniform are solved, and the aim of causing the sensitive material and the flexible substrate to be firmly bonded and uniformly distributed is achieved.

Description

technical field [0001] The invention belongs to the technical field of gas sensors, in particular to a NO sensor for room temperature detection 2 Method of gas sensor. Background technique [0002] With the development of science, the application of sensors is becoming more and more extensive, and it is imperative to manufacture a sensor that is light, cheap and can be manufactured in a large area. Gas sensors based on flexible substrates have fundamentally improved many problems due to their flexibility and other advantages, so that they have broader application prospects. [0003] NO 2 It is a typical air pollutant, mainly derived from the combustion of fossil fuels and vehicle exhaust emissions. It is one of the industrial pollutants that cause acid rain, photochemical smog and other problems. It is easy to react with hydrocarbons in the sun, causing respiratory diseases and serious threats. human health and survival. With the rapid development of industry, the NO 2 ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/00
Inventor 李冬梅詹爽梁圣法陈鑫谢常青刘明
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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