The dispatching method of the ye area scanning machine

Abstract

The invention discloses a dispatching method of a YE area scanner table. The dispatching method is applied to a host and a dispatching system, wherein the host is provided with a setting unit, an input sequencing unit, an inspection and calculation unit and a display output unit. The dispatching method includes the following steps of setting a dispatching rule, classifying, scanning and sequencing, inspecting and calculating, obtaining a final scanning sequence, displaying and outputting the final scanning sequence, and carrying out automatic dispatching. The dispatching method has the advantages that the dispatching rule is set, and the dispatching method ensures that verification goods are timely scanned, wherein the verification goods are products delivered from factories in priority and products having problems in scanner tables; the automatic dispatching of unmanned operation of the YE area scanner table is achieved; through inspection of the detection and calculation process of the calculation unit, the problem that the goods automatically jump over scanning stations of the YE area scanner table because of stacking of the goods due to the fact that the goods with multiple batches are dispatched to one scanner table at the same time can be solved.

Description

technical field [0001] The invention relates to the technical field of automatic control of semiconductor production, in particular to a method for assigning workers to a YE (Yield Enhancement, yield enhancement) area scanning machine. Background technique [0002] In the current semiconductor foundry production, automation equipment is already very common. The production process equipment has been able to perform automatic film transfer, process processing, data recording, automatic judgment of whether the production wafer conforms to the process and other automated production. However, in OEM production, due to the complex and diverse product types and different technical processes, it is necessary to arrange the production sequence of the products on the machine. Arrange production. [0003] Chinese invention patent (publication number: CN1499570) discloses a semiconductor process dispatching control method and a method of manufacturing semiconductor components, which ar...

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Problems solved by technology

[0005] Both of the above two patents disclose the dispatching method in the semiconductor manufacturing process, but they do not involve the dispatching method of the scanning machines in the YE area. In the production area, the scanning machines in the YE area are mainly responsible for the process machines in the entire production area. Yield rate monitoring, the YE area monitors the defect status of all production process machines according to a certain ratio. Generally, YE engineers will control the products to be scanned by modifying the product sampling rate, and need to exceed the production capacity of the scanning machines to reach The utilization rate of the scanning machine is as high as possible; among all the products waiting for scanning and monitoring, there are also many types of problems, such as: sampling products for process machine monitoring; scanning of products with product defects found on the problem machine; need to focus Scanning incoming goods of monitoring machines; products that need to be shipped first in the entire production area; after machine maintenance, the first batch of confirmed products; wafer scanning for engineers to do experiments, etc.; although all of the above types need to be scanned, but Due to the limited scanning capability of the YE area scanning machines, YE engineers are currently responsible for selecting products with a high degree of importance to scan, which often misses defective products and cannot detect the existence of machines that produce defective products in time. question

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