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Method of reel-to-reel preparation of large-area micro-nano structured generator membrane

A micro-nano structure, large-area technology, applied in the field of micro-nano science, can solve the problems of product area limited by size, complex preparation process of micro-nano structure generator film, etc., to achieve high repeatability, low cost and simple operation. Effect

Active Publication Date: 2015-06-03
ZHONGBEI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a roll-to-roll method for preparing a large-area micro-nano structure generator film in order to solve the existing problems of complex preparation process and size limitation of the product area in the existing method for preparing a micro-nano structure generator film

Method used

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  • Method of reel-to-reel preparation of large-area micro-nano structured generator membrane
  • Method of reel-to-reel preparation of large-area micro-nano structured generator membrane
  • Method of reel-to-reel preparation of large-area micro-nano structured generator membrane

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preparation example Construction

[0023] 3) Preparation of the plastic polymer embossed film: first, the plastic polymer 6 obtained in step 2) is coated on the flat substrate 7, and the flat substrate 7 is placed on the conveyor belt 1 above the first heater 2, The first heater 2 preliminarily shapes the plastic polymer 6 on the planar substrate 7, the heating temperature of the first heater 2 is 60-65°C, and the initial molding time is 50-60min; then, the planar substrate 7 is passed through embossing Roller 5, the plastic polymer 6 preliminarily formed on the flat substrate 7 is embossed with a regular micro-nano concave-convex structure 9 by the embossing roller 5; then, the flat substrate 7 is transferred to the top of the second heater 4 through the conveyor belt 1, and the second The second heater 4 solidifies and shapes the plastic polymer 6 embossed with the micro-nano concave-convex structure 9 on the planar substrate 7, the heating temperature of the second heater 4 is 75-80° C., and the curing and se...

Embodiment 1

[0028] A roll-to-roll method for preparing a large-area micro-nano structure generator film, comprising the steps of:

[0029] 1) Preparation of the preparation device: the preparation device includes a conveyor belt 1, the first heater 2, the support roller 3 and the second heater 4 are sequentially installed under the conveyor belt 1, and the position above the conveyor belt 1 is installed directly opposite the support roller 3 There is an embossing roller 5, and the surface of the embossing roller 5 is provided with a regular micro-nano concave-convex structure 9;

[0030] 2) Preparation of plastic polymer: Take carbon nanotubes and piezoelectric particles and mix them evenly at a mass ratio of 1:13, then put the mixed particles into alcohol for ultrasonic treatment for 18 minutes, then put them in a drying oven to dry for 1.5 hours, and then The dried mixed particles were added to the liquid PDMS, stirred evenly and vacuumed to remove air bubbles, the mixed particles and l...

Embodiment 2

[0035] A roll-to-roll method for preparing a large-area micro-nano structure generator film, comprising the steps of:

[0036] 1) Preparation of the preparation device: the preparation device includes a conveyor belt 1, the first heater 2, support roller 3 and second heater 4 are installed in sequence under the conveyor belt 1, and the position above the conveyor belt 1 is installed directly opposite the support roller 3 There is an embossing roller 5, and the surface of the embossing roller 5 is provided with a regular micro-nano concave-convex structure 9;

[0037] 2) Preparation of plastic polymers: Take carbon nanotubes and piezoelectric particles and mix them evenly at a mass ratio of 1:10, then put the mixed particles into alcohol for ultrasonic treatment for 20 minutes, then put them in a drying oven to dry for 2 hours, and then dry them The final mixed particles were added to liquid PDMS, stirred evenly and vacuumed to remove air bubbles, mixed particles and liquid PDM...

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Abstract

The invention provides a method of reel-to-reel preparation of large-area micro-nano structured generator membranes, and solves problems such as complex process and limited size of product area in methods for preparing micro-nano structured generator membranes in the prior art. The method comprises firstly mixing carbon nano tubes and piezoelectric particles in proportion to liquid PDMS to form a plastic polymer, then placing the plastic polymer in an impression apparatus and impressing the plastic polymer through steps of initial molding, impressing and solidifying and shaping to obtain a micro-nano concave and convex structure, and finally sputtering electrodes on the plastic polymer to obtain the micro-nano structured generator membrane. The method is simple in process and low in cost, has good repeatability, can help to rapidly prepare the large-scale flexible membrane material having uniform thickness and components in batches. The method lays foundations for integration, large-scale production and commercialization of micro-power, development of new energy, and reuse of renewable energy.

Description

technical field [0001] The invention belongs to the field of micro-nano science and technology, in particular to a roll-to-roll method for preparing a large-area micro-nano structure generator film. Background technique [0002] Micro-nano generator is a small-volume, high-power micro-energy device that has developed rapidly in recent years. It can collect tiny vibrational mechanical energy in the surrounding environment and convert it into electrical energy to power other nano-devices, such as sensors and detectors. Provide energy. The invention of micro-nano generators not only brings the possibility of miniaturization of energy systems, but more importantly, for the realization of nano or microelectronic devices that are completely wireless, bio-implantable, and unattended for a long period of time or even for a lifetime, micro-nano Generators provide an ideal power system. [0003] At present, the preparation method of the micro-nano structure generator film is the sil...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L41/22H01L41/37H01L41/33H01L41/333
Inventor 薛晨阳张文栋丑修建刘俊熊继军张强李俊漾高立波海振银邢燕婷
Owner ZHONGBEI UNIV
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