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Titanium and magnesium codoped alumina luminescent thin film and preparation method and application thereof

A technology of luminescent film and aluminum oxide, applied in chemical instruments and methods, luminescent materials, gaseous chemical plating, etc.

Active Publication Date: 2013-12-04
OCEANS KING LIGHTING SCI&TECH CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the titanium-magnesium co-doped aluminum oxide light-emitting film that can be applied to thin-film electroluminescent displays has not been reported yet.

Method used

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  • Titanium and magnesium codoped alumina luminescent thin film and preparation method and application thereof
  • Titanium and magnesium codoped alumina luminescent thin film and preparation method and application thereof
  • Titanium and magnesium codoped alumina luminescent thin film and preparation method and application thereof

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preparation example Construction

[0031] The preparation method of the above-mentioned titanium-magnesium co-doped alumina luminescent film comprises the following steps:

[0032] Step S11, loading the substrate into the reaction chamber of the chemical vapor deposition equipment, and setting the vacuum degree of the reaction chamber to 1.0×10 -2 Pa~1.0×10 -3 Pa.

[0033] In this embodiment, the substrate is indium tin oxide glass (ITO). It can be understood that in other embodiments, it can also be fluorine-doped tin oxide glass (FTO), aluminum-doped zinc oxide (AZO) or indium-doped glass. zinc oxide (IZO); the substrate was ultrasonically cleaned with toluene, acetone and ethanol for 5 minutes, then rinsed with distilled water, dried in nitrogen and sent to the reaction chamber;

[0034] Preferably, the vacuum degree of the reaction chamber is 4.0×10 -3 Pa.

[0035] Step S12 , heat-treating the substrate at 600° C. to 800° C. for 10 minutes to 30 minutes.

[0036] Step S13, adjusting the temperature of ...

Embodiment 1

[0070] The substrate is ITO glass, which is ultrasonically cleaned with toluene, acetone and ethanol for 5 minutes, then rinsed with distilled water, air-dried with nitrogen, and sent to the reaction chamber of the equipment. Use a mechanical pump and a molecular pump to evacuate the vacuum of the chamber to 4.0×10 -3 Pa; Then the substrate is heat-treated at 700°C for 20 minutes, and then the temperature is lowered to 500°C. Turn on the rotating motor, adjust the rotating speed of the substrate support to 300 rpm, and feed the organic source triethylaluminum (CH 3 CH 2 ) 3 Al, titanium tetraisopropoxide TTIP and magnesium dicene (C 5 h 5 ) 2 The molar ratio of Mg is 1:0.05:0.03, the carrier gas is argon, and the flow rate of argon is 10 sccm. Oxygen is introduced, and the flow rate of oxygen gas is 120 sccm, and the deposition of the film is started. The thickness of the film is deposited to 150nm, close the organic source and carrier gas, continue to pass oxygen, the ...

Embodiment 2

[0076] The substrate is ITO glass, which is ultrasonically cleaned with toluene, acetone and ethanol for 5 minutes, then rinsed with distilled water, air-dried with nitrogen, and sent to the reaction chamber of the equipment. Use a mechanical pump and a molecular pump to evacuate the vacuum of the chamber to 1.0×10 -3 Pa; Then the substrate is heat-treated at 700°C for 10 minutes, and then the temperature is lowered to 250°C. Turn on the rotating motor, adjust the rotating speed of the substrate support to 50 rpm, and feed the organic source triethylaluminum (CH 3 CH 2 ) 3 Al, titanium tetraisopropoxide TTIP and magnesium dicene (C 5 h 5 ) 2 The molar ratio of Mg is 1:0.08:0.06, the carrier gas is argon, and the flow rate of argon is 10 sccm. Oxygen is introduced, and the flow rate of oxygen gas is 10 sccm, and the deposition of the film is started. The thickness of the film is deposited to 80nm, close the organic source and carrier gas, continue to pass oxygen, the tem...

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Abstract

A titanium and magnesium codoped alumina luminescent thin film has a chemical formula of Al2O3:xTi<4+>, yMg<2+>, wherein alumina is a matrix, titanium element and magnesium element are activation elements, x is greater than or equal to 0.01 and is less than or equal to 0.08, and y is greater than or equal to 0 and is less than or equal to 0.06. In an electroluminescence (EL) spectrum of the titanium and magnesium codoped alumina luminescent thin film, a wavelength region of 410 nm has very strong luminescence peaks, and the titanium and magnesium codoped alumina luminescent thin film can be used in a thin-film electroluminescent display. The invention also provides a preparation method and application of the titanium and magnesium codoped alumina luminescent thin film.

Description

【Technical field】 [0001] The invention relates to a titanium-magnesium co-doped aluminum oxide luminescent film, a preparation method thereof, a thin-film electroluminescent device and a preparation method thereof. 【Background technique】 [0002] Thin film electroluminescent display (TFELD) has attracted widespread attention and developed rapidly due to its advantages such as active light emission, full solid state, impact resistance, fast response, large viewing angle, wide application temperature, and simple process. At present, the research of color and even full-color TFELD and the development of multi-band luminescent films are the development direction of this subject. However, there is no report on titanium-magnesium co-doped aluminum oxide luminescent films that can be applied to thin-film electroluminescent displays. 【Content of invention】 [0003] Based on this, it is necessary to provide a titanium-magnesium co-doped alumina light-emitting thin film applicable ...

Claims

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Application Information

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IPC IPC(8): C09K11/64C23C16/44C23C16/30H01L33/50
Inventor 周明杰王平陈吉星黄辉
Owner OCEANS KING LIGHTING SCI&TECH CO LTD
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