Filament exchange jig and filament exchange structure

Abstract

The invention provides a filament exchange jig and a filament exchange structure, which does not always occupy redundant space for exchanging a filament, and can reduce loading / unloading times of an auxiliary vacuum container when the filament exchange. The filament exchange jig comprises the auxiliary vacuum container and an operation rod, wherein the operation rod goes through the auxiliary vacuum container, and a front end part of the operation rod is installed on a filament support structure in the auxiliary vacuum container, for withdrawing the filament from a vacuum chamber to the auxiliary vacuum container when the auxiliary vacuum container is in a vacuum air discharging state. The auxiliary vacuum container comprises: a container main body, forming an installing port which is contacted with the exterior of the vacuum chamber, can demountably installed on the exterior of the vacuum chamber, and make the filament pass through, wherein the filament can be taken out by the operation rod, and a filament getting-out port for the filament passing through when exchanging the filament; and a cover, capable of opening or closing the filament getting-out port.

Description

technical field [0001] The present invention relates to a filament changer and a filament replacement structure used when replacing a filament used in a vacuum chamber such as an ion source or an electron source. Background technique [0002] For example, in the manufacture of liquid crystal displays and semiconductor devices, ion implanters are used to implant ions into liquid crystal glass substrates and semiconductor substrates. An ion source for generating plasma and extracting ion beams is provided in the ion implantation apparatus. [0003] In the ion source, a plurality of filaments protrude from a plasma generation chamber that communicates with a processing chamber that irradiates an ion beam to a substrate and maintains a vacuum, and the gas introduced into the plasma generation chamber ionized to produce plasma. [0004] However, the filament may be deteriorated or damaged as the ion source is operated over time, so that the filament needs to be replaced periodi...

AI Technical Summary

Problems solved by technology

[0014] In order to prevent the auxiliary vacuum container 1A from being crushed by the atmospheric pressure when the inside is evacuated, the auxiliary vacuum container 1A is formed of a metal body and thus heavy, so the installation and removal operations of the auxiliary vacuum container 1A are repeated many times. , will increase the burden on the replacement operator

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