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Minitype orthogonal exciting fluxgate sensor

A fluxgate sensor and orthogonal excitation technology, which is applied to the magnetic field measurement and the size/direction of the magnetic field using the magnetic flux control principle, can solve the problems of too small cross-sectional area of ​​the iron core and low sensitivity, and achieve the purpose of increasing the size of the iron core. Cross-sectional area, sensitivity improvement, and the effect of increasing input impedance

Inactive Publication Date: 2013-12-11
NORTHWESTERN POLYTECHNICAL UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In order to overcome the deficiency of low sensitivity of existing fluxgate sensors, the present invention provides a miniature orthogonal excitation fluxgate sensor
The fluxgate disclosed in the present invention adopts multiple sets of excitation wires and iron cores arranged in an S shape to increase the cross-sectional area of ​​the iron core without increasing the excitation current, and solves the problem that the cross-sectional area of ​​the iron core is too small; the use of a three-dimensional solenoid ensures The tight coupling between the induction coil and the iron core is conducive to the improvement of sensitivity; the use of segmented iron core instead of simply shortening the length of the iron core ensures that the sensitivity will not be caused by the reduction of the number of turns of the secondary coil under the condition of increasing the linear measurement range Significantly lower; S-shaped arrangement of multiple sets of excitation lines increases the input impedance of the sensor, increases the working voltage of the sensor, and reduces the useless power consumption on the drive circuit

Method used

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  • Minitype orthogonal exciting fluxgate sensor

Examples

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Embodiment 1

[0022] Example 1. refer to Figure 1-4 . High sensitivity quadrature excitation miniature fluxgate.

[0023] The miniaturized quadrature excitation fluxgate in this embodiment contains SiO 2 The Si substrate 1 of the insulating layer is used to provide support for the entire structure. 20 excitation wires 2 arranged in an S-shape and iron cores 3 made of soft magnetic materials with a number of segments around them are used as the middle layer together, and such a middle layer is surrounded by a three-dimensional solenoid induction coil 4 perpendicular to it. , Between the induction coil 4 and the iron core 3, polyimide is used as the insulating layer 5. The excitation line 2 and the induction coil 4 are respectively connected to the excitation line pad 6 and the induction coil pad 7 on the substrate 1 . The upper and lower layers of the three-dimensional solenoid are connected through a through hole 8, and its two ends are respectively connected to the induction coil pad...

Embodiment 2

[0045] Example 2. refer to Figure 5-8 . Large linear measurement range, low power quadrature excitation miniature fluxgate.

[0046] The miniaturized orthogonal excitation fluxgate in this embodiment includes a Si substrate 1 with a SiO2 insulating layer for providing support for the entire structure. The four excitation wires 2 arranged in an S shape and the iron core 3 made of soft magnetic material with 10 segments around them are used as the middle layer together, and such a middle layer is formed by a three-dimensional solenoid induction coil 4 perpendicular to it. Surrounded by polyimide as the insulating layer 5 between the induction coil 4 and the iron core 3 . The excitation line 2 and the induction coil 4 are respectively connected to the excitation line pad 6 and the induction coil pad 7 on the substrate 1 . The upper and lower layers of the three-dimensional solenoid are connected through a through hole 8, and its two ends are respectively connected to the ind...

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Abstract

The invention discloses a minitype orthogonal exciting fluxgate sensor used for resolving the technical problem that an existing fluxgate sensor is low in sensitivity. According to the technical scheme, an orthogonal exciting operating mode is adopted, the minitype orthogonal exciting fluxgate sensor comprises multiple groups of exciting lines arranged of an S type, iron cores, subsection iron core structures, and induction coils of three-dimensional solenoid structures and closely coupled with the iron cores, and a communication part between the upper layer and the lower layer of the three-dimensional solenoid coils is formed by multiple connecting conductors. The multiple groups of exciting lines arranged of the S type and the iron cores enable sectional areas of the iron cores to be increased, excitation currents are not increased, and the problem that the sectional area of each iron core is too small is resolved; three-dimensional solenoids are adopted to guarantee close coupling between the induction coils and the iron cores, the subsection iron cores guarantee increasing of a linear measurement range, the sensitivity cannot be sharply decreased due to reduction of the number of secondary coil turns, and the sensitivity is improved; the multiple groups of exciting lines arranged of the S type enable input impedance of the sensor to be increased, working voltage of the sensor is improved, and useless power consumed on a driving circuit is reduced.

Description

technical field [0001] The invention relates to a fluxgate sensor, in particular to a miniature orthogonal excitation fluxgate sensor. Background technique [0002] Fluxgate is a magnetic field component sensor with good comprehensive performance. The miniaturized quadrature excitation fluxgate is small in size, light in weight, simple in structure, and easy to adjust the linear measurement range, but there are technical problems of low sensitivity and low excitation efficiency. [0003] refer to Figure 9 . The document "An orthogonal fluxgate-type magnetic microsensor with electroplated permalloy core. Sensors and Actuators A: Physical, 2007, 135(1): 43-49" discloses a micro fluxgate structure with an orthogonal structure and a preparation method thereof. An electroplated Cu wire is used as the excitation wire 1; the excitation wire 1 made of Cu coated with electroplated NiFe alloy is used as the iron core 2; a planar spiral coil is prepared by sputtering on the glass su...

Claims

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Application Information

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IPC IPC(8): G01R33/04
Inventor 刘诗斌郭博
Owner NORTHWESTERN POLYTECHNICAL UNIV