Minitype orthogonal exciting fluxgate sensor
A fluxgate sensor and orthogonal excitation technology, which is applied to the magnetic field measurement and the size/direction of the magnetic field using the magnetic flux control principle, can solve the problems of too small cross-sectional area of the iron core and low sensitivity, and achieve the purpose of increasing the size of the iron core. Cross-sectional area, sensitivity improvement, and the effect of increasing input impedance
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Embodiment 1
[0022] Example 1. refer to Figure 1-4 . High sensitivity quadrature excitation miniature fluxgate.
[0023] The miniaturized quadrature excitation fluxgate in this embodiment contains SiO 2 The Si substrate 1 of the insulating layer is used to provide support for the entire structure. 20 excitation wires 2 arranged in an S-shape and iron cores 3 made of soft magnetic materials with a number of segments around them are used as the middle layer together, and such a middle layer is surrounded by a three-dimensional solenoid induction coil 4 perpendicular to it. , Between the induction coil 4 and the iron core 3, polyimide is used as the insulating layer 5. The excitation line 2 and the induction coil 4 are respectively connected to the excitation line pad 6 and the induction coil pad 7 on the substrate 1 . The upper and lower layers of the three-dimensional solenoid are connected through a through hole 8, and its two ends are respectively connected to the induction coil pad...
Embodiment 2
[0045] Example 2. refer to Figure 5-8 . Large linear measurement range, low power quadrature excitation miniature fluxgate.
[0046] The miniaturized orthogonal excitation fluxgate in this embodiment includes a Si substrate 1 with a SiO2 insulating layer for providing support for the entire structure. The four excitation wires 2 arranged in an S shape and the iron core 3 made of soft magnetic material with 10 segments around them are used as the middle layer together, and such a middle layer is formed by a three-dimensional solenoid induction coil 4 perpendicular to it. Surrounded by polyimide as the insulating layer 5 between the induction coil 4 and the iron core 3 . The excitation line 2 and the induction coil 4 are respectively connected to the excitation line pad 6 and the induction coil pad 7 on the substrate 1 . The upper and lower layers of the three-dimensional solenoid are connected through a through hole 8, and its two ends are respectively connected to the ind...
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