Air path control system of vacuum absorption platform
A vacuum adsorption platform, vacuum adsorption technology, applied in pneumatic program control, jet program control and other directions, can solve problems such as difficulty in reclaiming materials, and achieve the effect of simple structure
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[0014] In order to make the objectives, technical solutions and advantages of the present invention clearer, the following further describes the present invention in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, but not to limit the present invention.
[0015] Such as figure 1 As shown, this embodiment provides a gas path control system for a vacuum adsorption platform, which is used for adsorbing and fixing the sheet material when the etching machine processes the sheet material. The gas path control system of the vacuum adsorption platform includes a vacuum adsorption workbench 10, a first air distribution seat 20, a direct flow valve 30, a first vortex air pump 40, a second air distribution seat 50, a pressure regulating filter 60, and a flue gas purification Cover 70, second vortex air pump 80, solenoid valve 90 and pressure sensor 100. ...
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