X-ray combination refractor focusing performance test device based on CCD detection

Abstract

The invention discloses an X-ray combination refractor focusing performance test device based on CCD detection. The X-ray combination refractor focusing performance test device based on CCD detection comprises a base guide rail, an X-ray light tube, a laser device and an X-ray CCD, wherein the base guide rail, the laser device and the X-ray CCD are longitudinally located on the base guide rail. An adjustment table is located on one side of the base guide rail, the optical axis of the X-ray light tube and the optical axis of the laser device are longitudinally arranged, and the X-ray light tube and the laser device can be transversely and movably installed on the adjustment table; an X-ray combination refractor to be detected is located in the middle of the base guide rail, and the optical axis of the X-ray combination refractor to be detected is longitudinally arranged; the X-ray CCD is located on the other side of the base guide rail, and the optical axis of the X-ray CCD and the optical axis of the X-ray combination refractor are on the same straight line; the exit end of the X-ray light tube or the exit end of the laser device and the incidence end of the X-ray combination refractor to be detected are oppositely arranged, and the exit end of the X-ray combination refractor to be detected and the X-ray CCD are oppositely arranged. The X-ray combination refractor focusing performance test device based on CCD detection is simplified in structure, greatly reduces cost and is good in practicability.

Description

technical field [0001] The invention relates to the field of X-ray detection and imaging, in particular to a device capable of measuring the focusing performance of an X-ray combined refraction lens. Background technique [0002] The X-ray combined refraction lens is a new type of X-ray focusing device based on the refraction effect. Its theoretical focus spot size can reach the nanometer level. The actual test focus spot size is usually several microns, and it has small size, simple manufacturing process, The advantages of good robustness and batch processing are suitable for X-ray detection and imaging systems with high detection resolution; secondly, the X-ray combined refraction lens covers a very wide range of photon energies, so X-ray detection and imaging systems based on it are suitable for In a variety of applications; finally, because it is based on the refraction effect, it does not need to bend the optical path when focusing the X-ray beam, so the formed detectio...

AI Technical Summary

Problems solved by technology

[0004] In order to overcome the deficiencies of the existing X-ray composite refraction lens focusing performance testing methods, which are complex in mechanism, expensive in operation and maintenance, and poor in practicability, the present invention provides an X-ray composite refraction lens with simplified structure, reduced cost and good practicability Focus performance test device

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