Quartz bearing boat
A technology of quartz and quartz rods, which is applied in the field of semiconductor production, can solve the problems of small support contact surface, poor stability, and easy breakage
Inactive Publication Date: 2013-12-25
济南科盛电子有限公司
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Problems solved by technology
The disadvantages of the existing SIPOS deposited quartz boats are as follows: First, the grooved quartz rods are further corroded and thinned after being soaked in mixed acid for many times; second, there is no support between the left and right grooved quartz rods, which is easy to break during operation and taking ; Third, the support contact surface between the upper and lower grooved quartz rods is small, the stability is poor, and it is prone to breakage during the process of entering and exiting the furnace, causing the wafer to fall and be scrapped
Method used
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[0010] The specific implementation manners of the present invention will be described below in conjunction with the accompanying drawings. The invention discloses a quartz bearing boat, comprising a boat body and quartz pull rings 6 arranged at both ends of the boat body, the boat body includes a lower grooved quartz rod 9 and an upper supporting quartz rod 3 connected thereto, a middle supporting quartz rod 4. The lower support quartz rod 5, the load-bearing quartz rod 2, etc., the upper grooved quartz rod 1 is set on the boat body, the side support quartz bending plate 8 is set between the upper grooved quartz rod 1 and the lower grooved quartz rod 9 . There are at least two side support quartz bent plates 8 . The side support quartz bent plate 8 is arranged symmetrically on both sides. The side support quartz bent plates 8 are evenly distributed. The grooves of the upper grooved quartz rod 1 correspond to the grooves of the lower grooved quartz rod 9 one by one. In the ...
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The invention discloses a quartz bearing boat which comprises a boat body and pull rings which are arranged at the two ends of the boat body. The boat body comprises a lower carving groove quartz rod, an upper supporting quartz rod, a middle supporting quartz rod, a lower supporting quartz rod, a bearing quartz rod and the like, wherein the upper supporting quartz rod, the middle supporting quartz rod, the lower supporting quartz rod, the bearing quartz rod and the like are connected with the lower carving groove quartz rod. The quartz bearing boat is characterized in that an upper carving groove quartz rod is arranged on the boat body, and a side supporting quartz bending plate is arranged between the upper carving groove quartz rod and the lower carving groove quartz rod. The quartz bearing boat has the advantages that the upper groove carving quartz rod is arranged, the support is enhanced between the upper carving groove quartz rod and the lower carving groove quartz rod, the stability of the boat body is increased, the fracture phenomenon happening easily in the process of going in and out of a furnace is avoided, the bearing capacity of the quartz bearing boat is enhanced, the breakage probability of the quartz bearing boat is lowered, and the service life of the quartz bearing boat is prolonged. The quartz bearing boat has the advantages of being good in using effect, simple in structure and low in cost.
Description
technical field [0001] The invention relates to the technical field of semiconductor production. In particular, it relates to a quartz carrier boat for use in SIPOS deposition processes in semiconductor production. Background technique [0002] The LPCVD system in the production process of semiconductor products needs to go through the process of SIPOS deposition, which is characterized in that a layer of SIPOS film is deposited on the surface of the wafer under special conditions through special gas, and at the same time, a layer of SIPOS film is deposited on the surface of the quartz carrier boat carrying the wafer. After repeated deposition, the quartz carrier boat needs to be soaked in mixed acid to remove the SIPOS film on the surface, and the service life and stability of the quartz carrier boat after repeated mixed acid immersion become the constraints of production cost. The disadvantages of the existing SIPOS deposited quartz boats are as follows: First, the groove...
Claims
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IPC IPC(8): H01L21/673
Inventor 郭城吕明徐明星郭英云纪大鹏
Owner 济南科盛电子有限公司