Nanometer positioning device and system

Abstract

The invention relates to a nanometer positioning device and a nanometer positioning system, belongs to the technical field of automatic control of grating ruling machinery and solves the technical problems that in the prior art, the upper limit of the adjusting amplitude of a tilt angle and the adjusting precision of a nanometer positioning device are limited by the performance parameters, and the data collecting control module of a nanometer positioning system is large in developing difficulty. The nanometer positioning device comprises a substrate, a macro positioning platform, a first guiding guide track, a second guiding guide track, a micro-positioning platform, piezoelectric ceramic, a first laser interference displacement detection mechanism and a second laser interference displacement detection mechanism; one end of the piezoelectric ceramic is fixed on the macro positioning platform while the other end is contacted with the micro-positioning platform; the macro positioning platform slides along the first and second guiding guide tracks; the piezoelectric ceramic drives the micro-positioning platform to generate displacement. The invention also provides the nanometer positioning system applying the nanometer positioning device. The nanometer positioning device and the nanometer positioning system have a larger upper limit of the adjusting amplitude of the tilt angle and adjusting flexibility.

Description

technical field [0001] The invention relates to a nanometer positioning device and system, belonging to the field of automatic control of grating marking machinery. Background technique [0002] Nanopositioning technology is widely used in various fields such as superfinishing, microelectronics engineering, bioengineering, and nanotechnology. When the nanopositioning system is used in the grating mechanical scribing process, the movement direction of the nanopositioning system is kept perpendicular to the movement direction of the grating cutter. Due to the swing angle error of the nanopositioning system, the grating lines are not parallel, that is, there is a swing angle error of the grating line, which directly leads to the degradation of the grating quality and the increase of the stray light of the grating. [0003] Nanopositioning devices in the prior art generally use two or more piezoelectric ceramics to double-layer worktables (the double-layer workbench includes a ...

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Problems solved by technology

[0004] In order to solve the technical problems that the upper limit of the swing angle adjustment amplitude and the adjustment accuracy of the nanopositioning device in the prior art are limited by performance parameters, the difficulty in developing the data acquisition and control module of the nanopositioning system, and the high cost and cycle of the modification of the grating marking machine, this paper The invention provides a nano-positioning device and system

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