The invention relates to a nanometer positioning device and a nanometer
positioning system, belongs to the technical field of
automatic control of
grating ruling machinery and solves the technical problems that in the prior art, the upper limit of the adjusting amplitude of a tilt angle and the adjusting precision of a nanometer positioning device are limited by the performance parameters, and the
data collecting control module of a nanometer
positioning system is large in developing difficulty. The nanometer positioning device comprises a substrate, a
macro positioning platform, a first guiding guide track, a second guiding guide track, a micro-positioning platform, piezoelectric
ceramic, a first
laser interference displacement detection mechanism and a second
laser interference displacement detection mechanism; one end of the piezoelectric
ceramic is fixed on the
macro positioning platform while the other end is contacted with the micro-positioning platform; the
macro positioning platform slides along the first and second guiding guide tracks; the piezoelectric
ceramic drives the micro-positioning platform to generate displacement. The invention also provides the nanometer
positioning system applying the nanometer positioning device. The nanometer positioning device and the nanometer positioning
system have a larger upper limit of the adjusting amplitude of the tilt angle and adjusting flexibility.