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Plasma torch

A plasma and torch technology, applied in the field of plasma torch, can solve the problem of reducing the vortex generated by the vortex bushing

Active Publication Date: 2014-01-01
EDWARDS LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the use of an air gap reduces the ability of the vortex liner to generate vortices because a portion of the plasma source gas will pass into the plasma formation region instead of being transported along the vortex liner's ducting
Also, arcing will likely start from the metal eddy current bushing, destroying it over time

Method used

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Experimental program
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Embodiment Construction

[0047] exist image 3 , a DC plasma torch 10 includes a cathode arrangement 12 and an anode arrangement 14, as described previously in relation to figure 1 and figure 2 Described by known torches. in such as image 3 The present invention shown with figure 1 and figure 2 The main difference between the shown prior art torches is that the swirl liner 40 is made of metal. To insulate the eddy current bushing 40 from the adjacent cathode 12 and anode 14, an annular ceramic insert (ceramic electrical break) 50 is provided. The eddy current liner element 40 is formed from a conductive metal or alloy that withstands temperatures above 200°C, such as copper, stainless steel or tungsten. The eddy current liner may be a separate element that is tightly bonded to the cathode 12 body 26 and in electrical contact with the cathode 12 body 16 . Alternatively, it may be integral with and formed from the same material as cathode 12 body 26 . If the vortex liner is formed from a sepa...

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PUM

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Abstract

To lengthen the service period on DC plasma abatement devices a modified DC plasma torch is provided with an electrically conductive cathode and an electrically conductive anode spaced apart from one another to form a gap therebetween; a metal swirl bush at least partially located within the gap and comprising a channel adapted to permit, in use, a gas to flow through the gap; and a ceramic element interposed between any one or more of: the cathode and the swirl bush; and the anode and the swirl bush.

Description

technical field [0001] The present invention relates to plasma torches. The invention is particularly useful for abatement of exhaust gases from processes such as those in the semiconductor industry. Background technique [0002] Preventing or limiting the release of hazardous gases from industrial processes to the atmosphere is now a major focus of the scientific and industrial sectors. In particular, the semiconductor industry, where the use of process gases is inherently inefficient, has set itself the goal of reducing the amount of gas vented from processing plants to the atmosphere. Examples of compounds desired to be destroyed are those obtained from etching processes such as fluorine, SF 6 、NF 3 or perfluorocarbons (CF 4 、C 2 f 6 Wait). [0003] One method of destroying or abatement of unwanted gases from the exhaust stream uses a plasma abatement device. Plasma is particularly useful when the fuel gas normally used for abatement by combustion is not readily a...

Claims

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Application Information

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IPC IPC(8): H05H1/34
CPCH05H2001/3468H05H1/34H05H2001/3484H05H2001/3426H05H1/3421H05H1/3468H05H1/3484H05H1/26
Inventor S.A.沃罗宁C.J.P.克莱门茨D.M.麦克格拉思F.格雷A.J.西利
Owner EDWARDS LTD