Acceleration sensor structure
A technology of acceleration sensor and pole plate, which is applied in the field of microelectronics, can solve the problems of high processing cost and production cost, cumbersome process, complex structure, etc., and achieve the effects of simple processing process, saving production cost and simple structure
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment
[0019] Such as figure 1 The acceleration sensor structure shown includes a support base 1, an upper pole plate 4 and a lower pole plate 5 are fixed on the inner wall of the support base 1, and a movable pole plate 3 is arranged in the support base 1. Both ends of the movable pole plate 3 are fixed with elastic beams 2, the movable pole plate 3 is parallel to the upper pole plate 4, and the support seat 1 is provided with a force receiving hole 6 at the contact point with the elastic beam 2.
[0020] The upper pole plate 4, the lower pole plate 5 and the movable pole plate 3 are all connected to the signal processing circuit.
[0021] In order to facilitate the processing of the capacitance variation on the upper plate 4 and the lower plate 5 by the signal processing circuit, the upper plate 4 and the lower plate 5 are located on the same vertical plane.
[0022] In order to further improve the measurement accuracy, there are two upper pole plates 4 and two lower pole plates 5...
PUM
Login to View More Abstract
Description
Claims
Application Information
Login to View More 