Nonzero-digit interference system based on point source array

An interferometric system and point source array technology, applied in the field of a series of free-form surface components, can solve the problem of not designing optical free-form surface components, achieve the effects of efficient, fast and generalized detection methods, eliminate errors, and expand the dynamic measurement range

Inactive Publication Date: 2014-01-22
NANJING UNIV OF SCI & TECH
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Problems solved by technology

At present, no surface shape measurement optical system based on point source array optical free-form surface elements has been designed in China.

Method used

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  • Nonzero-digit interference system based on point source array
  • Nonzero-digit interference system based on point source array
  • Nonzero-digit interference system based on point source array

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Embodiment 1

[0049] According to formula (1), formula (2) and optimization algorithm, finally for a series of free-form surface elements with maximum surface gradient deviation within ±10° and relative aperture less than 0.4 (F number greater than 2.5), a point source array based Non-zero interferometric system. The optical and structural parameters of the gradient compensation module are designed as follows: the gradient deviation of the maximum compensation is ±10°; the diameter of the lens array 10 is Φ42 mm, the diameter of the sub-lenses of the lens array 10 is Φ2 mm, and the number of sub-lenses of the lens array 10 is 21×21 , the numerical aperture of the lens array 10 sub-lenses is 0.17; the field angle of the collimating lens group 12 is ±5°, the effective working aperture of the collimating lens group 12 is Φ118mm, and the focal length of the collimating lens group 12 is 225mm; the spherical compensation lens group 13 The field of view is ±5°, the effective working diameter of th...

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Abstract

The invention discloses a nonzero-digit interference system based on a point source array. The nonzero-digit interference system comprises a Twyman-Green interference system, a gradient compensating module, a free-form surface to be tested, an collimating lens, a diaphragm, an imaging lens and a CCD (Charge Coupled Device), wherein the optical parameter of the point source array is determined according to the parameter of the free-form surface to be tested; mathematical relationships between the optical and structural parameters of a lens array, an collimating lens group and a spherical compensating lens group are determined according to each obtained parameter of the point source array; three optimal solution evaluation standards are given, and an optimal optical parameter and an optimal structural parameter of the gradient compensating module are determined in combination with the parameters. Different zero-digit compensators do not need to be designed according to different testing surfaces, and the nonzero-digit interference system is a general free-form surface shape measuring system which ensures high efficiency and high speed while realizing high-precision measurement; meanwhile, a self-collimating light path satisfying zerodigit compensation is not needed, and the advantage is more remarkable specific to surface shape measurement with great gradient change.

Description

technical field [0001] The invention belongs to the field of optical precision testing, and specifically relates to a non-zero position interference system based on a point source array, which can test a series of free-form surface elements with a maximum surface gradient deviation within ±10° and a relative aperture of less than 0.4 (F number greater than 2.5). Background technique [0002] Compared with traditional optical elements, free-form optical elements can provide more degrees of freedom for the actual optical system. The optical free-form surface can not only obtain better optical quality than the traditional optical surface, but also has the advantages of reducing the overall size of the optical components and the system, and reducing the weight of the system. Therefore, optical free-form surface components have been widely used in military and civilian fields such as astronomical observation and national defense weapons. However, due to the high degree of freedo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/24
Inventor 沈华朱日宏李嘉王念陈磊何勇高志山
Owner NANJING UNIV OF SCI & TECH
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