Nonzero-digit interference system based on point source array
An interferometric system and point source array technology, applied in the field of a series of free-form surface components, can solve the problem of not designing optical free-form surface components, achieve the effects of efficient, fast and generalized detection methods, eliminate errors, and expand the dynamic measurement range
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[0049] According to formula (1), formula (2) and optimization algorithm, finally for a series of free-form surface elements with maximum surface gradient deviation within ±10° and relative aperture less than 0.4 (F number greater than 2.5), a point source array based Non-zero interferometric system. The optical and structural parameters of the gradient compensation module are designed as follows: the gradient deviation of the maximum compensation is ±10°; the diameter of the lens array 10 is Φ42 mm, the diameter of the sub-lenses of the lens array 10 is Φ2 mm, and the number of sub-lenses of the lens array 10 is 21×21 , the numerical aperture of the lens array 10 sub-lenses is 0.17; the field angle of the collimating lens group 12 is ±5°, the effective working aperture of the collimating lens group 12 is Φ118mm, and the focal length of the collimating lens group 12 is 225mm; the spherical compensation lens group 13 The field of view is ±5°, the effective working diameter of th...
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