Nonzero-digit interference system based on point source array

An interferometric system and point source array technology, applied in the field of a series of free-form surface components, can solve the problem of not designing optical free-form surface components, achieve the effects of efficient, fast and generalized detection methods, eliminate errors, and expand the dynamic measurement range
CN103528539AInactive Publication Date: 2014-01-22NANJING UNIV OF SCI & TECH
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
NANJING UNIV OF SCI & TECH
Publication Date
2014-01-22
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a nonzero-digit interference system based on a point source array. The nonzero-digit interference system comprises a Twyman-Green interference system, a gradient compensating module, a free-form surface to be tested, an collimating lens, a diaphragm, an imaging lens and a CCD (Charge Coupled Device), wherein the optical parameter of the point source array is determined according to the parameter of the free-form surface to be tested; mathematical relationships between the optical and structural parameters of a lens array, an collimating lens group and a spherical compensating lens group are determined according to each obtained parameter of the point source array; three optimal solution evaluation standards are given, and an optimal optical parameter and an optimal structural parameter of the gradient compensating module are determined in combination with the parameters. Different zero-digit compensators do not need to be designed according to different testing surfaces, and the nonzero-digit interference system is a general free-form surface shape measuring system which ensures high efficiency and high speed while realizing high-precision measurement; meanwhile, a self-collimating light path satisfying zerodigit compensation is not needed, and the advantage is more remarkable specific to surface shape measurement with great gradient change.
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Description

technical field

[0001] The invention belongs to the field of optical precision testing, and specifically relates to a non-zero position interference system based on a point source array, which can test a series of free-form surface elements with a maximum surface gradient deviation within ±10° and a relative aperture of less than 0.4 (F number greater than 2.5). Background technique

[0002] Compared with traditional optical elements, free-form optical elements can provide more degrees of freedom for the actual optical system. The optical free-form surface can not only obtain better optical quality than the traditional optical surface, but also has the advantages of reducing the overall size of the optical components and the system, and reducing the weight of the system. Therefore, optical free-form surface components have been widely used in military and civilian fields such as astronomical observation and national defense weapons. However, due to the high degree of freedo...

Claims

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