Variable diameter micro optical fiber ring based optical micromechanical acceleration sensor and its method

An acceleration sensor, micro-fiber technology, applied in the direction of measurement of acceleration, speed/acceleration/impact measurement, instruments, etc., can solve the problems of difficult optical fiber end face coating process, expensive processing and testing instruments, poor parallelism of optical fiber end face, etc. Dynamic measurement range, the effect of improving measurement accuracy and stability
CN100458448CInactive Publication Date: 2009-02-04ZHEJIANG UNIV
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
ZHEJIANG UNIV
Publication Date
2009-02-04
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses a variable diameter microfiber ring based optical micromechanical acceleration sensor and method thereof, which uses diameter variable ring produced by a microfiber with a diameter of 1~25 micron drawed in a standard single-mode fiber by laser heating taper-drawing technique after removing the coated layer of fiber. The microfiber connected with the standard single-mode fiber through a graded taper transition area is disposed as a diameter variable ring, and the two microfiber of microfiber ring crossing are kept axially parallel, one of which is mounted on the movable mass block of sensing acceleration, while another is mounted on the silicon substrate. The input end of the standard single-mode fiber is connected with wide-spectrum light source, the output end is connected with the fiber spectrometer, and the sensing to acceleration is realized by using diameter variable microfiber ring as high-sensitivity sensing member. The invention is capable of improving measurement precision and stability of optical micromechanical acceleration sensor and increasing dynamic measurement range.
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Description

technical field

[0001] The invention relates to an optical micromechanical acceleration sensor based on a variable-diameter micro-fiber ring and a method thereof. Background technique

[0002] An acceleration sensor is a sensor device that uses known detectable physical quantities to sense or indirectly measure acceleration changes. It is widely used in aerospace, missile positioning guidance, industrial manufacturing, and vehicle installations. At present, there are various acceleration sensors based on different sensing principles. In recent years, with the progress of micro-machining technology, micro-machined acceleration sensors based on this process have also been developed rapidly. Compared with conventional acceleration sensors, micro-machined acceleration sensors The sensor has significant advantages such as high integration, small size, and low power consumption. However, most of the current micro-mechanical acceleration sensors have the disadvantages of low measur...

Claims

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