Variable diameter micro optical fiber ring based optical micromechanical acceleration sensor and its method

Abstract

The invention discloses a variable diameter microfiber ring based optical micromechanical acceleration sensor and method thereof, which uses diameter variable ring produced by a microfiber with a diameter of 1~25 micron drawed in a standard single-mode fiber by laser heating taper-drawing technique after removing the coated layer of fiber. The microfiber connected with the standard single-mode fiber through a graded taper transition area is disposed as a diameter variable ring, and the two microfiber of microfiber ring crossing are kept axially parallel, one of which is mounted on the movable mass block of sensing acceleration, while another is mounted on the silicon substrate. The input end of the standard single-mode fiber is connected with wide-spectrum light source, the output end is connected with the fiber spectrometer, and the sensing to acceleration is realized by using diameter variable microfiber ring as high-sensitivity sensing member. The invention is capable of improving measurement precision and stability of optical micromechanical acceleration sensor and increasing dynamic measurement range.

Description

technical field [0001] The invention relates to an optical micromechanical acceleration sensor based on a variable-diameter micro-fiber ring and a method thereof. Background technique [0002] An acceleration sensor is a sensor device that uses known detectable physical quantities to sense or indirectly measure acceleration changes. It is widely used in aerospace, missile positioning guidance, industrial manufacturing, and vehicle installations. At present, there are various acceleration sensors based on different sensing principles. In recent years, with the progress of micro-machining technology, micro-machined acceleration sensors based on this process have also been developed rapidly. Compared with conventional acceleration sensors, micro-machined acceleration sensors The sensor has significant advantages such as high integration, small size, and low power consumption. However, most of the current micro-mechanical acceleration sensors have the disadvantages of low measur...

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Problems solved by technology

[0003] In existing reports, fiber optic micromechanical acceleration sensors mostly use ordinary optical fibers to measure light intensity changes caused by external acceleration changes. However, the lack of anti-interference ability of light intensity measurement restricts the practical application of such sensors. The problem of poor anti-interference ability of light intensity measurement, there has been an acceleration sensor that uses ordinary optical fiber end face reflection to form a fabry-perot cavity. The coating process is difficult, and the poor parallelism of the fiber end face and low coupling efficiency have become difficult problems to solve; in the latest international research on optical micro-mechanical acceleration sensors, micro-mechanical technology is used to fabricate optical fabry-perot cavities , this kind of micro-resonator-type acceleration sensor is superior to the fiber-end fabry-perot cavity type in terms of integration and coupling efficiency, but it has a considerable difference in the processing technology of the reflective surface coating of the micro-resonator cavity and the plane roughness of the cavity wall. It is very difficult, the required processing and testing instruments are also very expensive, and the dynamic range of this type of micro-resonator sensor measurement is very small, it is difficult to meet the requirements of practical applications

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