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SECS/GEM message exchange equipment and SECS/GEM message exchange method

A technology of message exchange and equipment, applied in the direction of data exchange network, comprehensive factory control, digital transmission system, etc., can solve problems such as communication defects

Active Publication Date: 2014-02-26
SHANGHAI HUALI MICROELECTRONICS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0012] In view of the above existing problems, the present invention discloses a SECS / GEM message exchange device and method to overcome the defects in the prior art that are caused by the communication between the semiconductor device and the upper system through the EAP system

Method used

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  • SECS/GEM message exchange equipment and SECS/GEM message exchange method
  • SECS/GEM message exchange equipment and SECS/GEM message exchange method

Examples

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Embodiment Construction

[0051] The present invention will be further described below in conjunction with the accompanying drawings and specific embodiments, but not as a limitation of the present invention.

[0052] The first embodiment of the present invention relates to a SECS / GEM message exchange device, which is applied to the communication between the semiconductor device and the host, such as figure 1 As shown, it includes: configuration file manager, sequentially connected device-side SECS / GEM driver, device message buffer, forwarder, host message buffer and host-side SECS / GEM driver, and the configuration file manager is also connected to the repeater.

[0053] Specifically, the configuration file manager is used to set the configuration file for message exchange between the semiconductor device and the host, and can also view, modify, and update the configuration file. The SECS / GEM message exchange device in this embodiment The configuration file is automatically loaded at startup, and the c...

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Abstract

The invention relates to the technical field of automation control in the semiconductor manufacturing process and particularly relates to a piece of SECS / GEM message exchange equipment which is used in communication between semiconductor equipment and a host. The SECS / GEM message exchange equipment comprises a configuration file manager, an equipment-end SECS / GEM driver, an equipment message buffer, a host-end SECS / GEM driver, a host message buffer and a transponder. The invention further relates to an SECS / GEM message exchange method. By the adoption of the equipment and the method of the invention, one piece of semiconductor equipment can be connected with a plurality of hosts and is enabled to simultaneously communicate with a plurality of hosts, thus increasing the message exchange rate and improving the production efficiency; effective decoupling can be carried out in the case of a plurality of upper systems, which enables the coupling degree of the systems to be the minimum and facilitates system maintenance; and the pressure of an EAP system is reduced and the time delay of the upper systems in data receiving is shortened.

Description

technical field [0001] The present invention relates to the technical field of automatic control in the semiconductor manufacturing process, in particular to the communication between semiconductor equipment and a host computer, specifically a SECS (Semiconductor Equipment Communication Standard, semiconductor equipment communication standard) / GEM (Generic Equipment Model, general Device Model) Message Exchange Devices and Methods. Background technique [0002] SECS / GEM, HSMS (High speed SECS Message System, high-speed SECS message system) is a semiconductor industry communication standard protocol developed by SEMI (Semiconductor Equipment and Materials Institute, Semiconductor Equipment and Materials Association). At present, most semiconductor equipment complies with With this protocol, the EAP (Equipment Automation Program) system running on the host (Host) communicates with the device through this protocol to modify device parameters, issue instructions, etc., thereby c...

Claims

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Application Information

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IPC IPC(8): H04L12/58H04L29/08G05B19/418
CPCY02P90/02
Inventor 陈智文杨习刚
Owner SHANGHAI HUALI MICROELECTRONICS CORP
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