Alkaline cleaning additive used after acid texturing of polycrystalline silicon wafers, and using method thereof
A polycrystalline silicon wafer, alkali cleaning technology, applied in the directions of detergent compositions, detergent compounding agents, chemical instruments and methods, etc.
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Embodiment 1
[0024] An alkali cleaning additive for acid texturing of polycrystalline silicon wafers and a method of use thereof, the process steps are as follows:
[0025] 1) Prepare alkaline cleaning additives: Add 0.1g of Span-80, 0.6g of Tween-40, and 0.3g of lauryl polyethylene glycol ether into deionized water to obtain 100g of alkaline cleaning additive solution.
[0026] 2) Prepare alkaline cleaning solution: dissolve 1.5kg of NaOH in deionized water to obtain 50kg of alkaline solution; dissolve 100g of alkaline cleaning additive prepared in step 1) in the alkaline solution to obtain alkaline cleaning solution.
[0027] 3) Alkali cleaning: immerse the acid-textured polysilicon wafer in the alkali cleaning solution prepared in step 2) for surface alkali cleaning, the temperature of the alkali cleaning is 25° C., and the time of alkali cleaning is 25 s.
[0028] After conventional cleaning and cleaning after adding the alkaline cleaning additive of the present invention, the efficien...
Embodiment 2
[0033] An alkali cleaning additive for acid texturing of polycrystalline silicon wafers and a method of use thereof, the process steps are as follows:
[0034] 1) Prepare alkaline cleaning additives: add 0.5g of Span-80, 2.5g of Tween-40, and 1.5g of lauryl polyethylene glycol ether into deionized water to obtain 100g of alkaline cleaning additive solution.
[0035] 2) Prepare alkaline cleaning solution: dissolve 0.5kg of NaOH in deionized water to obtain 5kg of alkaline solution; dissolve 100g of alkaline cleaning additive prepared in step 1) in the alkaline solution to obtain alkaline cleaning solution.
[0036] 3) Alkali cleaning: immerse the acid-textured polysilicon wafer in the alkali cleaning solution prepared in step 2) to perform surface alkali cleaning, the temperature of the alkali cleaning is 45° C., and the alkali cleaning time is 10 s.
[0037] After conventional cleaning and cleaning after adding the alkaline cleaning additive of the present invention, the effec...
Embodiment 3
[0041] An alkali cleaning additive for acid texturing of polycrystalline silicon wafers and a method of use thereof, the process steps are as follows:
[0042] 1) Prepare alkaline cleaning additives: add 0.3g of Span-80, 1.5g of Tween-40, and 1g of lauryl polyethylene glycol ether into deionized water to obtain 100g of alkaline cleaning additive solution.
[0043] 2) Prepare alkaline cleaning solution: dissolve 1kg of NaOH in deionized water to obtain 20kg of alkaline solution; dissolve 100g of alkaline cleaning additive prepared in step 1) into the alkaline solution to obtain alkaline cleaning solution.
[0044] 3) Alkali cleaning: immerse the acid-textured polysilicon wafer in the alkali cleaning solution prepared in step 2) to perform surface alkali cleaning, the temperature of the alkali cleaning is 30° C., and the alkali cleaning time is 18 s.
[0045] After conventional cleaning and cleaning after adding the alkaline cleaning additive of the present invention, the effect...
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