Three-ring-shaped athermalized biosensor
A biosensor and three-ring technology, which is applied in the field of biosensors, can solve the problems of uneven temperature, area waste, and long distance between the reference microring and the detection microring, and achieves no need for temperature control devices, high integration, and avoidance of temperature uneven effect
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[0033]In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0034] Such as figure 1 , 2 , 3, and 4 are schematic structural diagrams of the tricyclic athermal biosensor provided by the preferred embodiment of the present invention. The three-ring type athermal biosensor includes a substrate and a microstructure arranged on the substrate, and the microstructure includes: a main structure 1; an incident coupling grating 4; a three-way beam splitter 5; three microring resonators 6, 7 , 8; three outgoing coupling gratings 9.
[0035] The substrate includes a silicon dioxide buried layer 2 and a silicon substrate layer 3 , the tricyclic athermal biosensor main...
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