A tricyclic athermal biosensor
A biosensor and three-ring technology, applied in the field of biosensors, can solve problems such as uneven temperature, waste of area, and long distance between the reference microring and the detection microring, and achieve no need for temperature control devices, avoid temperature unevenness, and integrate high degree of effect
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[0033]In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present invention, not to limit the present invention.
[0034] like figure 1 , 2 , 3, and 4 are schematic structural diagrams of the tricyclic athermal biosensor provided by the preferred embodiment of the present invention. The three-ring type athermal biosensor includes a substrate and a microstructure arranged on the substrate, and the microstructure includes: a main structure 1; an incident coupling grating 4; a three-way beam splitter 5; three microring resonators 6, 7 , 8; three outgoing coupling gratings 9.
[0035] The substrate includes a silicon dioxide buried layer 2 and a silicon substrate layer 3 , the tricyclic athermal biosensor main st...
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