Expanded semiconductor chip and semiconductor device
A semiconductor and chip technology, applied in the field of extended semiconductor chips and semiconductor devices, can solve the problems of increased manufacturing costs and systems, and achieve the effect of preventing physical damage and avoiding the effects of thermal stress
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no. 1 Embodiment approach
[0035] refer to figure 1 (a)~ figure 1 (c) The first embodiment of the present invention will be described.
[0036] Such as figure 1 (a)~ figure 1 As shown in (c), the semiconductor device 1 according to the first embodiment uses, for example, silicon (Si) as a base material, and consists of a first semiconductor chip 2 having transistors and multilayer wiring layers, and an upper surface (element formation surface) The extended semiconductor chip 3 which holds the first semiconductor chip 2 and includes a plurality of semiconductor chips 31 and 32 is constituted. In the multilayer wiring layers in each of the semiconductor chips 2, 31, and 32, for example, a Low-k material is used as an insulating layer.
[0037] On the surface of the first semiconductor chip 2 facing the extended semiconductor chip 3 and on the surface where the element is formed, a plurality of first external connections made of metals such as copper (Cu), aluminum (Al) or nickel (Ni) are formed. Elec...
no. 2 Embodiment approach
[0067] Below, refer to Figure 7 (a)~ Figure 7 (c) The second embodiment of the present invention will be described.
[0068] Such as Figure 7 (a)~ Figure 7 The semiconductor device 7 according to the second embodiment shown in (c) uses, for example, silicon (Si) as a base material, and consists of an extended semiconductor chip 81 and a second semiconductor chip 82 each having a transistor and a multilayer wiring layer. The semiconductor chip 8 is constituted by a resin substrate (wiring substrate) 9 made of an epoxy resin material or the like as a base material for holding the expanded semiconductor chip on the upper surface. For the multilayer wiring layers in each of the semiconductor chips 81 and 82, for example, a Low-k material is used as an insulating layer.
[0069] The resin expansion part 83 made of epoxy resin material etc. is filled between the mutually adjacent side surfaces of the first semiconductor chip 81 and the second semiconductor chip 82 in the ext...
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