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Evaporation source, vacuum deposition apparatus, and method of manufacturing organic el display device

A manufacturing method and technology of a display device are applied in the field of evaporation sources to achieve the effects of preventing climbing and preventing temperature rise

Inactive Publication Date: 2014-04-09
HITACHI HIGH-TECH CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

On the other hand, the size of the substrate on which the organic thin film is formed is increasing year by year

Method used

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  • Evaporation source, vacuum deposition apparatus, and method of manufacturing organic el display device
  • Evaporation source, vacuum deposition apparatus, and method of manufacturing organic el display device
  • Evaporation source, vacuum deposition apparatus, and method of manufacturing organic el display device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1）

[0062] image 3 It is a cross-sectional view showing the structure of the first embodiment 3A of the evaporation source of the present invention. The evaporation source 3A is, for example, a Knudsen unit (K unit). The K unit consists of a crucible 32 made of ceramics (PBN, alumina, carbon materials, etc.), a heater 33 for heating the crucible, a thermocouple 19 for controlling the temperature of the crucible, and a supply for vapor deposition The material feeder 20 of the material 4 is composed of a heat shield (not shown) for preventing heat from leaking to the outside, and a water cooling shield. The material feeder 20 moves to the outlet of the crucible only during feeding to feed the material, thereby preventing the material from adhering to the material feeder 20 during vapor deposition.

[0063] The evaporation source 3A is provided with heat-reflecting members 11 and 12 in order to prevent the aluminum material as the evaporation material 4 from climbing up and achieve th...

Embodiment 2）

[0066] Figure 5 It is a cross-sectional view showing the structure of the second embodiment 3B of the evaporation source of the present invention.

[0067] In the first embodiment, in order to reduce the heat radiation, the heat reflecting members 11 and 12 are provided in the direction in which the steam 2 is released, that is, sandwiching the flange portion 34 of the crucible 32. In this embodiment, in order to further promote the effect of preventing climbing, in addition to the heat reflecting member 11 provided on the side of the heater 33, a heat reflecting member is provided between the crucible body 32a which is not the flange portion 34 and the heater 33. 13. Reduce heat radiation to the flange portion 34 and the vicinity of the outlet of the crucible 32. The heat reflecting members 11 and 13 may also be integrated. In that case, as long as a part of the heat reflecting member is arranged between the crucible body 32a and the heater 33, the same effect can be obtained....

Embodiment 3）

[0070] Figure 7 It is a cross-sectional view showing the structure of the third embodiment 3C of the evaporation source of the present invention.

[0071] In Example 1 and Example 2, because the heat reflection member 12 is exposed to the vapor 2 from the outlet of the crucible 32, the vapor deposition material may adhere to the heat reflection member 12 and cause failure. In this embodiment, in order to solve the above-mentioned material adhesion problem, a nozzle 16 is provided at the outlet of the crucible 32, so that the heat reflection member 12 is not exposed to the vapor 2 even more. The nozzle 16 is made of ceramic material that is not a problem even if the vapor deposition material adheres. For example, when the vapor deposition material is aluminum, in order to prevent damage, the same PBN material as the crucible is selected. It can also be other types of ceramic materials such as aluminum nitride and boron nitride composite materials.

[0072] Figure 8 It is a cross...

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Abstract

The invention provides an evaporation source, a vacuum deposition apparatus, and a method of manufacturing an organic EL display device. The evaporation source is capable of lowering heat radiation, saves electricity, corresponds to large substrates and rapidly forms metallic films with aluminum as the main material. The method relates to that in the evaporation source using a ceramic crucible, a heat reflection component is so arranged as a clamped rib to effectively cut off the out flowing of heat along the rib portion. The crucible can be effectively heated with less electricity, and the temperature rising of the rib portion can be prevented. Climbing is prevented.

Description

Technical field [0001] The present invention relates to an evaporation source, a vacuum evaporation device, and an organic EL display device manufacturing method, and more particularly to an effective evaporation source, a vacuum evaporation device, and an organic EL display device manufacturing method for forming an organic EL display device on a large substrate. Background technique [0002] Organic EL elements used in organic EL display devices and lighting devices have a structure in which an organic layer composed of organic materials is sandwiched from top to bottom with a pair of anode and cathode electrodes. By applying a voltage to the electrodes, the The cathode side injects holes and electrons into the organic layer, and through their recombination, it becomes a light-emitting structure. [0003] The organic layer has a structure of a multilayer film laminate including a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, an...

Claims

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Application Information

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IPC IPC(8): C23C14/24F27B14/04H05B33/10
CPCC23C14/243C23C14/26C23C14/547C23C14/548
Inventor 三宅龙也松浦宏育峰川英明矢崎秋夫尾方智彦山本健一楠敏明玉腰武司
Owner HITACHI HIGH-TECH CORP
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