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Large-stroke two-translation one-rotation precision positioning platform

A technology of precise positioning and moving platform, applied in the micro-nano field, can solve the problems of low axial bearing capacity, small stroke, complex structure, etc., and achieve the effect of simple and compact structure

Inactive Publication Date: 2014-04-09
TIANJIN UNIV
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AI Technical Summary

Problems solved by technology

[0003] However, at present, the micro-nano-scale precision positioning platform mainly uses two-degree-of-freedom translation. Even the designed three-degree-of-freedom precision positioning platform has defects such as complex structure, small stroke, and low axial bearing capacity, which is difficult to meet the requirements of practical applications. need

Method used

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  • Large-stroke two-translation one-rotation precision positioning platform
  • Large-stroke two-translation one-rotation precision positioning platform
  • Large-stroke two-translation one-rotation precision positioning platform

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Embodiment Construction

[0013] In order to further understand the invention content, characteristics and effects of the present invention, the following examples are given, and detailed descriptions are as follows in conjunction with the accompanying drawings:

[0014] see Figure 1 ~ Figure 3 , a large-stroke two-translation and one-rotation precision positioning platform, including a base 9 and a moving platform 7 arranged inside it, and the base 9 and the moving platform 7 are distributed uniformly along the circumference of the moving platform through three The hinge amplifying mechanism 5 is connected with three composite parallel plate flexible guide mechanisms 8.

[0015] One end of each hinge amplifying mechanism 5 is flexibly connected to the base 5, the other end is flexibly connected to the moving platform 7, and an input end is provided in the middle, and the input end of the hinge amplifying mechanism is connected through a flexible hinge 4 and a ball joint. 3 is connected to the piezoe...

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Abstract

The invention discloses a large-stroke two-translation one-rotation precision positioning platform which comprises a base and a movable platform body arranged in the platform. The base is connected with the movable platform body through three hinge amplification mechanisms evenly distributed in the circumferential direction of the movable platform body and three composite parallel plate flexible guide mechanisms. One end of each hinge amplification mechanism is flexibly connected with the base, the other end of each hinge amplification mechanism is flexibly connected with the movable platform body, an input end is arranged in the middle of each hinge amplification mechanism, and the input ends are connected with piezoelectric ceramic actuators. Each composite parallel plate flexible guide mechanism comprises eight parallel flexible plates and four rigid blocks distributed in the circumferential direction of the movable platform body. The three composite parallel plate flexible guide mechanisms and the three piezoelectric ceramic actuators are evenly distributed in the circumferential direction of the movable platform body at intervals. The large-stroke two-translation one-rotation precision positioning platform is simple and compact in structure, large in output displacement, high in axial rigidity and capable of being used as an auxiliary positioning platform of a nano microoperation system for achieving microscale feeding and precision positioning.

Description

technical field [0001] The invention belongs to the field of micro-nano technology, and specifically relates to a two-translation-rotation three-degree-of-freedom flexible precision positioning work platform that can be applied to a micro-operating system. Background technique [0002] With the development of science and technology, there is an urgent need for submicron or even nanometer precision positioning technology in the fields of ultra-precision machining, microelectronics engineering, bioengineering, and nanotechnology. The most typical application lies in the manufacture and production of nanometer devices. Nano-devices include nano-electronic devices and nano-optoelectronic devices, which can be widely used in electronics, optics, micro-mechanical devices, new computers, etc. It is the most dynamic research field in the field of new materials and new devices. , intelligence, high integration and other mainstream development directions. Due to the potential huge m...

Claims

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Application Information

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IPC IPC(8): G12B5/00
Inventor 蔡坤海田延岭张大卫
Owner TIANJIN UNIV
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