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Silicon wafer locating system for semiconductor manufacturing process

A manufacturing process and positioning system technology, applied in the field of positioning systems, can solve the problems of not being able to fully and effectively utilize the space of the working platform, occupying a large space, and cumbersome steps, and achieve the effects of saving limited space, reducing floor space, and simplifying procedures

Active Publication Date: 2014-04-09
SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The existing silicon wafer positioning device occupies a relatively large space and cannot make full use of the working platform space. In addition, the vacuum manipulator needs to place the silicon wafer on the silicon wafer positioning chamber for position calibration, and then remove it from the silicon wafer positioning chamber. Take out the silicon wafer and send it to the reaction chamber, the steps are cumbersome, the time is long, and the efficiency is low

Method used

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  • Silicon wafer locating system for semiconductor manufacturing process
  • Silicon wafer locating system for semiconductor manufacturing process
  • Silicon wafer locating system for semiconductor manufacturing process

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Embodiment Construction

[0024] The implementation of the present invention will be described in detail below in conjunction with the drawings and examples, so that the realization process of how to use technical means to solve technical problems and achieve technical effects in the present invention can be fully understood and implemented accordingly.

[0025] Please refer to figure 1 , figure 1 It is a structural schematic diagram of the existing wafer positioning system, including a wafer loading device 1, a process platform 2, a process chamber 3, and a wafer position positioning chamber 4; the existing wafer positioning system needs to occupy a platform mounting position 1 , The process platform 2 has a built-in vacuum manipulator to carry the silicon wafer to the silicon wafer position positioning chamber 4. After the measurement is completed, the silicon wafer is transported to another process chamber 3 for the next step of the process. The existing silicon wafer positioning system has cumbers...

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Abstract

The invention discloses a silicon wafer locating system for a semiconductor manufacturing process. The silicon wafer locating system comprises a working platform, vacuum mechanical arms used for carrying silicon wafers are arranged in the working platform, a circular hole used for jacking the silicon wafers is formed in the center of the arm of each vacuum mechanical arm, at least one silicon wafer locating device is arranged on the working platform, and the silicon wafer locating device is used for detecting and adjusting the central positions of the silicon wafers and the central positions of the arms of the vacuum mechanical arms after the vacuum mechanical arms fetch the silicon wafers. According to the silicon wafer locating system for the semiconductor manufacturing process, multiple silicon wafer position locating devices are arranged on the working platform and are matched with the machine tables of the multiple mechanical arms, limited space can be saved effectively, occupied area can be reduced, resource conservation can be facilitated, the procedures of feeding and taking silicon wafers from a silicon wafer locating chamber can be omitted, the working process can be simplified, and transmission efficiency of the silicon wafers can be improved.

Description

technical field [0001] The invention belongs to a positioning system, and in particular relates to a silicon wafer positioning system used in a semiconductor manufacturing process. Background technique [0002] The integrated circuit and semiconductor manufacturing industries promote the realization of equipment automation. The function of some semiconductor equipment is to perform certain processing on silicon wafers through physical and chemical means. This processing is called semiconductor technology, and silicon wafers are usually processed in It is carried out in a closed container under a vacuum environment, and these containers are usually called reaction chambers. In semiconductor production, it is necessary to accurately transport the silicon wafer to be reacted to the reaction chamber, driven by a stepping motor or a servo motor, and after the positioning of the silicon wafer is completed by the detection device, the silicon wafer is transported to the reaction ch...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L21/68H01L21/677
CPCH01L21/67167H01L21/681
Inventor 任大清
Owner SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT
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