Silicon wafer locating system for semiconductor manufacturing process
A manufacturing process and positioning system technology, applied in the field of positioning systems, can solve the problems of not being able to fully and effectively utilize the space of the working platform, occupying a large space, and cumbersome steps, and achieve the effects of saving limited space, reducing floor space, and simplifying procedures
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[0024] The implementation of the present invention will be described in detail below in conjunction with the drawings and examples, so that the realization process of how to use technical means to solve technical problems and achieve technical effects in the present invention can be fully understood and implemented accordingly.
[0025] Please refer to figure 1 , figure 1 It is a structural schematic diagram of the existing wafer positioning system, including a wafer loading device 1, a process platform 2, a process chamber 3, and a wafer position positioning chamber 4; the existing wafer positioning system needs to occupy a platform mounting position 1 , The process platform 2 has a built-in vacuum manipulator to carry the silicon wafer to the silicon wafer position positioning chamber 4. After the measurement is completed, the silicon wafer is transported to another process chamber 3 for the next step of the process. The existing silicon wafer positioning system has cumbers...
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