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Screw-type piezoelectric type energy collector and preparation method thereof

An energy harvester, spiral technology, applied in piezoelectric devices/electrostrictive devices, piezoelectric/electrostrictive/magnetostrictive devices, piezoelectric effect/electrostrictive or magnetostrictive motors, etc., It can solve the problems of insufficient low-frequency and wide-band, and achieve the effects of easy mass production, energy harvesting, and increased frequency bandwidth

Inactive Publication Date: 2014-04-23
PEKING UNIV +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the energy harvesters mentioned above do not fully meet the needs of low frequency and wide frequency band.

Method used

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  • Screw-type piezoelectric type energy collector and preparation method thereof
  • Screw-type piezoelectric type energy collector and preparation method thereof
  • Screw-type piezoelectric type energy collector and preparation method thereof

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Embodiment Construction

[0032] The present invention is further described below in conjunction with embodiment. The scope of the present invention is not limited by these examples, and the scope of the present invention is set forth in the claims.

[0033] The specific steps of the helical low-frequency broadband piezoelectric energy harvester provided by the present invention and its preparation method are described below in conjunction with accompanying drawings 1-4.

[0034] Referring to Fig. 1, Fig. 1(a) is a top view of the spiral energy harvester of the present invention. Fig. 1(b) is a schematic front view of the spiral piezoelectric energy harvester of the present invention. The structure of the energy harvester mainly includes: PVDF piezoelectric film, metal mass, and silicon mass. refer to figure 2 , figure 2 It is a scanning electron micrograph of the laser-cut PVDF film cantilever beam of the present invention. refer to image 3 , image 3 It is a microscope rendering of the electr...

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Abstract

The invention discloses a screw-type piezoelectric type energy collector and a preparation method thereof. The collector comprises a piezoelectric thin film, a metal electrode, an adhesive layer, metal mass blocks and silicon mass blocks. The screw-type piezoelectric type energy collector provided by the invention has the characteristics of low frequency and wide frequency band; the preparation method for the screw-type piezoelectric type energy collector is compatible with the conventional MEMS (micro-electro-mechanical system) technology, and batch production is facilitated.

Description

technical field [0001] The invention relates to the field of MEMS integrated processing, in particular to a spiral low-frequency broadband piezoelectric energy collector and a preparation method thereof. Background technique [0002] Micro-electro-mechanical system (MEMS) has attracted the attention of scientists at home and abroad due to its excellent characteristics such as low energy consumption and small size. Many MEMS systems such as Optical MEMS, RF MEMS and other MEMS systems have developed rapidly in recent years. However, the power supply problem of these systems is becoming a major obstacle to their development. The reason is that traditional MEMS The power supply part of the device is bulky, has limited storage capacity, and is difficult to replace in time. Since the energy harvester can convert the vibration energy widely present in the environment into electrical energy, it is receiving more and more attention. According to different working principles, energ...

Claims

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Application Information

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IPC IPC(8): H02N2/18B81B3/00B81C1/00
Inventor 张海霞刘雯韩梦迪黄贤良金勇
Owner PEKING UNIV
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