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High speed laser scanning system for silicon solar cell fabrication

A technology of solar cells and laser scanning, applied in the direction of manufacturing tools, laser welding equipment, circuits, etc.

Inactive Publication Date: 2014-04-23
APPLIED MATERIALS INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, these conventional systems are limited to rates of approximately 20m / s
So, the conventional approach takes significant time to produce conventional solar cells
Furthermore, with conventional laser systems, it is difficult to prevent damage to the underlying solar cell substrate during drilling of holes in the passivation layer

Method used

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  • High speed laser scanning system for silicon solar cell fabrication
  • High speed laser scanning system for silicon solar cell fabrication
  • High speed laser scanning system for silicon solar cell fabrication

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Embodiment Construction

[0017] Embodiments of the invention provide laser scanning devices for laser drilling holes in one or more layers during solar cell fabrication using polygon mirrors and beam shapers. In one embodiment, the apparatus is used to laser drill holes in the backside passivation layer of the solar cell during back electrical contact formation. The device incorporates the use of polygonal mirrors to improve the speed of rear electrical contact formation of the solar cell. The apparatus may also incorporate the use of a beam shaper to adjust the profile of the beam to prevent damage to the underlying solar cell substrate during laser drilling operations. Further, a laser scanning module is provided to control the speed and timing of the linear movement of the substrate and to control the operation of the laser scanning device in a closed loop manner to provide efficient laser drilling of material layers disposed on the substrate.

[0018] As used herein, the term "laser drilling" gen...

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Abstract

A laser scanning apparatus that uses a polygonal mirror and a beam shaper for laser drilling of holes in one or more layers during solar cell fabrication is provided. The apparatus may be used to laser drill holes in a back side passivation layer of a solar cell during back electrical contact formation. The apparatus includes the use of a polygonal mirror to improve the speed of the back electrical formation of a solar cell. The apparatus may also include the use of a beam shaper to tune the profile of the beam to prevent damage to the underlying solar cell substrate during laser drilling operations. A laser scanning module is provided which controls the speed and timing of linear movement of substrates and the operation of the laser scanning apparatus in a closed loop manner for laser drilling of material layers disposed on the substrates.

Description

technical field [0001] Embodiments of the invention generally relate to an apparatus and method for laser drilling holes in one or more layers during solar cell fabrication. In particular, the device incorporates polygon mirrors for improved laser drilling speed. Additionally, the device may include a beam shaper for preventing damage to the underlying solar cell substrate during drilling operations. Background technique [0002] Solar cells are photovoltaic elements that convert sunlight directly into electrical power. The most common solar cell material is silicon, which is in the form of a single crystal or polycrystalline substrate, sometimes called a wafer. Because the amortized cost of forming silicon-based solar cells to generate electricity is higher than the cost of producing electricity using conventional methods, efforts to reduce the cost required to form solar cells remain. [0003] Solar cells widely used today have a design of a P-N junction region formed n...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L31/18H01L31/042B23K26/57
CPCB23K26/063Y02E10/52B23K26/0838H01L27/1425B23K26/0622H01L31/0463
Inventor J·M·吉J·L·富兰克林
Owner APPLIED MATERIALS INC