Large diameter quartz tube cleaning method and cleaning machine

Abstract

The invention provides a large-caliber quartz tube cleaning method, which comprises the following steps that firstly, quartz tubes are placed into an acid washing groove with the hydrofluoric acid concentration being 15 percent to 20 percent to be soaked for 10 to 15 minutes; then, the quartz tubes are placed into an acid washing groove with the hydrofluoric acid concentration being 7 percent to 10 percent to be soaked for 15 to 20 minutes; then, the quartz tubes are placed into a tap water groove to be soaked for 4 to 6 minutes; next, the quartz tubes are placed into a deionized water groove to be soaked for 4 to 6 minutes; the soaked quartz tubes are placed into a cleaning machine to be flushed for 18 to 25 minutes, and the cleaning is completed. The large-caliber quartz tube cleaning method has the advantages that the step-by-step cleaning is carried out on the quartz tubes, so impurities on the quartz tube walls can be thoroughly soaked; through the arrangement of a horizontal slide passage and a slide block, the reciprocating flushing can be realized, and the flushing range is wide; an upper spray head and a lateral spray head are adopted, cleaning dead corners do not exist, and the overall cleaning of the quartz tubes is ensured; a multi-way connecting head is arranged, the cleaning on several groups of quartz tubes in one step can be realized, and the cleaning efficiency is improved; the water consumption of a device is low, the water resources are saved, and good cleaning effects are also obtained.

Description

technical field [0001] The invention relates to a quartz tube processing equipment, in particular to a large-diameter quartz tube cleaning method and a cleaning machine. Background technique [0002] In the existing quartz tube cleaning technology, since the quartz tube is made of silicon dioxide and has stable chemical and physical properties, hydrofluoric acid is often used in cleaning. The acid is soaked in the horizontal pickling tank, rinsed with a large amount of water after soaking, and then dried. Although this is simple and fast, there are problems in the following aspects: First, if the concentration of the acid is controlled If it is not good, it will affect the cleaning effect, resulting in unclean cleaning of impurities on the surface of the quartz tube, or affecting the performance of the quartz tube; The acid liquid left on the wall of the quartz tube leads to incomplete cleaning and affects the cleaning quality. Contents of the invention [0003] The tech...

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Problems solved by technology

[0002] In the existing quartz tube cleaning technology, since the quartz tube is made of silicon dioxide and has stable chemical and physical properties, hydrofluoric acid is often used in cleaning. The acid is soaked in the horizontal pickling tank, rinsed with a large amount of water after soaking, and then dried. Although this is simple and fast, there are problems in the following aspects: First, if the concentration of the acid is controlled If it is not good, it will affect the cleaning effect, resulting in unclean cleaning of impurities on the surface of the quartz tube, or affecting the performance of the quartz tube; The acid liquid left on the wall of the quartz tube leads to incomplete cleaning and affects the cleaning quality

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