Horizontal detecting device, levelling device and levelling method of workpiece in electrochemical system

Abstract

The invention provides a horizontal detecting device, levelling device and levelling method of a workpiece in an electrochemical system. The horizontal detecting device comprises a macrometric/micrometric displacement platform, a displacement table, a probe electrode and an electrochemical workstation. The displacement table is fixedly arranged on an X-Y plane which is determined by the macrometric/micrometric displacement platform and can make displacement on the X-Y plane, and an electrolytic tank and the displacement table are relatively static. The probe electrode is fixedly arranged in a Z direction which is determined by the macrometric/micrometric displacement platform, and the detection end of the probe electrode is soaked into an electrolyte in the electrolytic tank in a vertically downward mode and is away from the workpiece in the electrolytic tank by a preset distance. The working electrode of the electrochemical workstation is connected to the probe electrode, the auxiliary electrode and the reference electrode of the electrochemical workstation are both connected to be soaked into the electrolyte in the electrolytic tank, the potential of the working electrode is controlled to be constant, current signals of the working electrode are changed along with the movement of the displacement table, the current signals are detected, so that a current signal curve is obtained, and the tilting degree of the workpiece in the electrolytic tank can be known through the fluctuation amplitude of the current signal curve. By means of the horizontal detecting device, levelling device and levelling method of the workpiece in the electrochemical system, the horizontal detection precision of the workpiece in the electrolyte can be improved.

Description

technical field [0001] The invention relates to the field of electrochemical technology, in particular to a level detection device, a leveling device and a leveling method for workpieces in an electrochemical system. Background technique [0002] Since Bard's research group published a research paper on Scanning Electro-Chemical Microscope (SECM for short) in 1989, scanning electrochemical microscopy has become a very important electrochemical research technique. It has made great progress in the fields of high-resolution electrochemical imaging, heterogeneous and homogeneous reactions, cell imaging, and micro-nano processing. [0003] Regarding scanning electrochemical microscope hardware, it mainly includes tip preparation, tip manipulation and electrochemical modulation. The needle tip is prepared with ultra-micro electrodes, nano electrodes, and micro-nano tubes. The needle tip operation instrument mainly includes X-Y-Z stepping motor, piezoelectric ceramics in Z direc...

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Problems solved by technology

However, the dial gauge is a mechanical output, and its precision is low, so it cannot perform high-precision workpiece level detection; in addition, in the field of electrochemistry, the workpiece is usua

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