A fiber grating sensor for measuring the temperature in the cavity of arf excimer laser

An excimer laser, fiber grating technology, applied in thermometers, measuring devices, measuring heat and other directions, can solve the problem that temperature sensors cannot be used in high pressure, strong corrosive environments, etc., to improve the accuracy of temperature measurement in the cavity and increase the accuracy The effect of sex, small size and light weight

Active Publication Date: 2017-07-18
RAINBOW SOURCE LASER RSLASER
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Problems solved by technology

[0007] The technical problem to be solved by the present invention is that the fiber grating temperature sensor in the prior art cannot be used to seal the high pressure and strong corrosive environment

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  • A fiber grating sensor for measuring the temperature in the cavity of arf excimer laser
  • A fiber grating sensor for measuring the temperature in the cavity of arf excimer laser
  • A fiber grating sensor for measuring the temperature in the cavity of arf excimer laser

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Embodiment Construction

[0039] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

[0040] The main purpose of the present invention is to provide a sensor capable of accurately measuring the temperature in the cavity of an ArF excimer laser. Its realization mainly lies in placing a specially packaged fiber grating in the laser cavity to be tested, and obtaining the precise temperature in the cavity according to the change of the central wavelength.

[0041] Such as figure 1 , figure 2 As shown, the present invention provides a fiber grating sensor for accurately measuring the temperature in the cavity of an ArF excimer laser, comprising: a nickel-plated stainless steel tube 5, a recoated fiber grating sensor head 1, filled with the stainless steel tube 5 Internal heat-conducting glue 3, one end of th...

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Abstract

The invention discloses a fiber grating sensor for accurately measuring the temperature in the cavity of an ArF excimer laser, comprising: a recoated fiber grating sensor head (1), a transmission cable connected to one end of the fiber grating sensor head (1) An optical fiber (2), and a fiber grating sensor element composed of a heat-conducting glue (3) filled inside a stainless steel tube (5); a nickel-plated stainless steel tube (5 ); the fixing screw hole (7) on the fixing ring arm (6) of the stainless steel pipe (5) circle, the fixing ring arm (6), and the sealing ring (10) inside the fixing ring arm (6); set The optical cable connecting pipe (4) at the top of the opening of the stainless steel pipe (5), the protruding outlet pipe (9) at the top of the opening, and the optical cable (8) exported by the outlet pipe. The invention can be used for temperature measurement under high pressure and strong corrosive environment, and has high reliability and long service life.

Description

technical field [0001] The invention relates to an ArF excimer laser, in particular to a fiber grating sensor for real-time monitoring of the temperature in a cavity of the ArF excimer laser, belonging to the field of optical fiber sensing. Background technique [0002] In the ArF excimer laser, there is an optimal temperature range for the gas used as the working gain medium of the laser. In this temperature range, the laser has high energy conversion efficiency and output energy stability, so the performance of the output laser depends to a certain extent at the working temperature of the discharge chamber. When the excimer laser is working, a large amount of waste heat will be introduced by high-pressure gas discharge and fan operation, which will cause the temperature in the cavity to rise. If effective heat dissipation measures cannot be taken, the laser output quality will decrease, and the energy conversion efficiency and stability of the laser will also decrease. wi...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01K11/32G01K11/3206
Inventor 范元媛沙鹏飞宋兴亮赵江山李慧鲍洋周翊王宇
Owner RAINBOW SOURCE LASER RSLASER
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