Grating coupler with adjustable refractive index and manufacturing method thereof

Abstract

The invention relates to the technical field of photonic devices, in particular to a method for manufacturing a grating coupler with an adjustable refractive index. The method is characterized in that a grating groove is of a sub-wavelength structure with different transverse duty ratios, and a grating has different duty ratios fy in the transverse direction, namely, the direction y, at different positions x in the longitudinal direction, namely, the direction x; the value of the duty ratio fx of the grating in the longitudinal direction is a fixed value between zero and one; the transverse duty ratio fy of the sub-wavelength structure forming the grating grooves at different positions x in the longitudinal direction is determined by leakage factor distribution alpha (x) needed by output Guassian field distribution G (x). The grating coupler of the structure can effectively reduce coupling losses in the optical fiber and waveguide coupling process.

Description

technical field [0001] The invention relates to the fields of optical communication and optical interconnection, in particular to the design and preparation of an optical waveguide coupling structure with adjustable refractive index. The grating coupler with this structure can effectively reduce the coupling loss when optical fiber and waveguide are coupled. Background technique [0002] Driven by low cost and low power consumption, silicon photonics technology is based on the SOI (silicon-on-insulator) platform. So far, a variety of silicon photonic devices have been prepared and photonic integration has been realized. Silicon photonics technology is considered to be the solution to the current integration problems. The most promising technique for power consumption and bandwidth issues in circuits. An important challenge facing silicon photonics technology at present is how to introduce laser light sources into and out of the photonic integrated circuit. Due to its high c...

AI Technical Summary

Problems solved by technology

[0008] In order to solve the problem of mode mismatch between the output mode field of the ordinary uniform grating coupler and the mode field of the single-mode fiber existing in the prior art, the object of the present invention is to provide an adjustable refractive index for realizing high-efficiency broadband coupling Grating coupler and manufacturing method thereof, which can realize coupling between single-mode optical fiber and planar optical waveguide

Images