System and tapered waveguide for improving light coupling efficiency between optical fibers and integrated planar waveguides and method of manufacturing same
A waveguide light and tapered wave technology, applied in the field of optical mode converters, can solve the problems of not providing high coupling efficiency, wavelength independence, reliability, manufacturability, durability, and robustness, and achieve increased optical Effect of Coupling Efficiency
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[0019] The following detailed description, which refers to and considers in conjunction with the accompanying drawings, describes and illustrates one or more specific embodiments of the present invention. These embodiments are provided not to be limiting but to exemplify and teach the invention, shown and described in sufficient detail to enable those skilled in the art to practice the invention. Thus, where appropriate to avoid obscuring the invention, the description may omit certain information known to those skilled in the art.
[0020] Turning now to the drawings, and specifically to FIG. 1 , there is shown a schematic cross-sectional view of an exemplary starting material structure 10 for fabricating a tapered planar waveguide. A preferred starting material 10 for fabricating 1-D and 2-D waveguides is a silicon-on-insulator (SOI) structure. The SOI starting material 10 comprises a layer 12 of crystalline silicon grown on a planar substrate structure 13 . The planar sub...
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