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A device and method for automatic detection of process corners

A technology of automatic detection device and process corner, which is applied in the direction of semiconductor/solid-state device testing/measurement, electrical components, circuits, etc., can solve problems such as complex circuits, and achieve the effect of improving purity, realizing automatic correction, and realizing automatic detection

Active Publication Date: 2017-02-08
BYD SEMICON CO LTD
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Problems solved by technology

[0004] The existing process corner detection method is to use the delay of the standard cell to judge the size of the process corner. The delay of the standard cell is determined by the power supply voltage, temperature and process corner. If two of the variables, such as the power supply voltage and temperature, are fixed, the process corner is determined by this The delay time is determined. Although this method can detect the size of the process corner, this solution requires two power supplies and the circuit is complicated.

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  • A device and method for automatic detection of process corners
  • A device and method for automatic detection of process corners
  • A device and method for automatic detection of process corners

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[0031] The following describes in detail the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein the same or similar reference numerals refer to the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary, only used to explain the present invention, and should not be construed as a limitation of the present invention.

[0032] In the description of the present invention, unless otherwise specified and limited, it should be noted that the terms "installed", "connected" and "connected" should be understood in a broad sense, for example, it may be a mechanical connection or an electrical connection, or two The internal communication between the elements may be directly connected or indirectly connected through an intermediate medium, and those of ordinary skill in the art can understand the specific meanin...

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Abstract

The invention proposes a process-corner automatic detection device and method. The process-corner automatic detection device includes a phase discriminator, a voltage-controlled oscillator, a loop frequency divider and an automatic judgment and correction module. Frequency signals input at an input end of the phase discriminator include process corner information. The automatic judgment and correction module outputs different control words to the voltage-controlled oscillator according to the size of a control voltage output by the phase discriminator; the voltage-controlled oscillator outputs frequency bands under the control of the control words and the output frequency bands are in one-to-one correspondence to the sizes of the control words. The loop frequency divider feeds back frequency-band information output by the voltage-controlled oscillator to the phase discriminator and adjusts the size of the control voltage output by the phase discriminator. When the size of the control voltage output by the phase discriminator meets a threshold demand, the sizes of the control words are related with the sizes of processor corners. The process-corner automatic detection device and method perform automatic correction on a multiband phase-locked loop through the control words output by the automatic judgment and correction module so that process-corner automatic detection is realized and a demand that a high-precision analog circuit should correct process-corner deviations is met.

Description

technical field [0001] The invention relates to the technical field of circuit design, in particular to a detection device and method capable of automatically detecting the size of a process angle. Background technique [0002] The process angle reflects the change of some process parameters in the chip production process, such as gate oxide thickness, doping concentration, etc. The current variation range of the performance parameters of the chip is usually given in the form of the process angle. If the 3-corner model is adopted, there will be TT, FF and SS3 corners. TT refers to NFET-Typical corner and PFET-Typical corner (typical process corner of N-type field effect transistor and typical process corner of p-type field effect transistor), FF refers to NFET-Fast corner and PFET-Fast corner (N-type field effect transistor The fast process corner and the fast process corner of the p-type field effect transistor), SS refers to the NFET-Slowcorner and PFET-Slow corner (the s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/66
CPCH01L21/67253H01L22/26
Inventor 刘辉傅璟军冯卫
Owner BYD SEMICON CO LTD
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