Method for inducting two-dimensional periodic structure on surface of material through femtosecond laser

A periodic structure, femtosecond laser technology, applied in the field of laser applications

Inactive Publication Date: 2014-07-23
BEIJING INSTITUTE OF TECHNOLOGYGY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] The purpose of the present invention is to overcome the inability to obtain uniform and regular two-dimensional nanostructures in a simple and effective way, and to provide a technology for preparing two-dimensional surface periodicities by means of double-pulse femtosecond lasers with vertical polarization directions. A method of permanent structure, which simultaneously changes the incident laser wavelength, and then obtains surface two-dimensional periodic structures of various sub-wavelength sizes on the material

Method used

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  • Method for inducting two-dimensional periodic structure on surface of material through femtosecond laser
  • Method for inducting two-dimensional periodic structure on surface of material through femtosecond laser
  • Method for inducting two-dimensional periodic structure on surface of material through femtosecond laser

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Embodiment 1

[0023] Taking the femtosecond laser variable wavelength vertical polarization double pulse processing method of the present invention to induce a two-dimensional periodic conical structure on the surface of Ge material as an example, the specific application equipment is as follows:

[0024] Femtosecond laser system 1 is a laser produced by Spectrum Physics in the United States. The laser wavelength is 800nm, the pulse width is 50fs, the repetition frequency is 1KHz, the maximum energy of a single pulse is 3mJ, and the light intensity distribution is Gaussian and linearly polarized.

[0025] The optical parametric amplifier 2 is TOPAS-C produced by American Light Conversion Company, which can continuously adjust the 800nm ​​femtosecond laser pulse in the wavelength range of 290-2600nm with an adjustment accuracy of 0.1nm.

[0026] The structural components of the Michelson interferometer include: a polarization splitter prism 5 , a polarization combiner prism 6 , a first reflec...

Embodiment 2

[0034] The other steps are the same as in Embodiment 1, except that: in step (1), the laser wavelength is adjusted to 620nm through the optical parametric amplifier 2, wherein the wavelength adjustment accuracy is corrected by the fiber optic spectrometer 14; the period interval of the two-dimensional periodic conical structure becomes : 700-780nm.

Embodiment 3

[0036] The other steps are the same as in Example 1, except that: in step (1), the laser wavelength is adjusted to 1000 nm through the optical parametric amplifier 2, wherein the wavelength adjustment accuracy is corrected by the fiber optic spectrometer 14; the period interval of the two-dimensional periodic conical structure becomes : 1.1-1.25μm.

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Abstract

The invention relates to the field of laser application, in particular to a method for inducting a two-dimensional periodic structure on the surface of a material through a femtosecond laser. According to the method, near-infrared femtosecond laser single pulses are generated by a femtosecond laser device. The wavelengths of the near-infrared femtosecond laser single pulses are adjusted within the range between 290 nm and 2600 nm through a femtosecond laser optical parametric amplifier; the laser single pulses are modulated to laser double pulses perpendicular to the polarization direction through a laser path of a Michelson interface instrument structure and the total energy of the laser double pulses is adjusted to the degree not lower than an erosion threshold value of a sample to be machined through a continuous attenuation piece; the laser path is adjusted, so that the double pulses with the changed wave length are focused in the vertical direction after passing through a planoconvex lens and the sample to be machined is moved to enable the laser focus point to be located on the upper surface of the sample, wherein the double pulses are perpendicular to the polarization direction; finally, the sample to be machined is controlled to move horizontally at a set speed, and therefore the two-dimensional periodic structure can be obtained by scanning the surface of the sample. The even two-dimensional periodic structure with various sub-wavelengths can be induced on the surface of the material.

Description

technical field [0001] The invention relates to the field of laser applications, in particular to a method for inducing a two-dimensional periodic structure on the surface of a material with a femtosecond laser. Background technique [0002] The periodic structure of the surface of laser-induced materials has the characteristics of anti-light reflection and high hydrophobicity, and has a wide range of applications in the fields of organic light-emitting diodes, solar cells, and self-cleaning surfaces. Femtosecond lasers can induce subwavelength periodic fringe structures whose periodic direction is perpendicular to the laser polarization direction, but usually this structure is one-dimensional. In the literature M.Huang, F.L.Zhao, T.Q.Jia, Y.Cheng, N.S.Xu, and Z.Z Xu: Nanotechnology.18, 505301 (2007), the author used circularly polarized light to make a two-dimensional nanoparticle structure on the surface of ZnO; In the literature T.H.Her, R.J.Finlay, C.Wu, S.Deliwala, and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B23K26/362B23K26/0622B23K26/142
CPCB23K26/361B23K26/0622B23K26/0643B23K26/0652B23K26/142
Inventor 姜澜房巨强曹强
Owner BEIJING INSTITUTE OF TECHNOLOGYGY
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