Device for preparing tubular part inner hole coating
A tubular, inner hole technology, applied in the direction of coating, metal material coating process, gaseous chemical plating, etc., to achieve high-efficiency deposition, uniform deposition in the axial direction, and increase the effect of density and uniformity
Active Publication Date: 2014-07-23
NO 59 RES INST OF CHINA ORDNANCE IND
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Problems solved by technology
This device solves the problem of arc ignition on the inner wall of slender tubular parts with large aspect ratio during PECVD, and realizes the uniform preparation of wear-resistant composite coatings used on the inner wall of tubular parts under high temperature conditions
Method used
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Embodiment 1
[0026] Example 1, see figure 1 , 3 , 4: A device for preparing the inner hole coating of tubular parts, including a clamping fixture 1, an auxiliary electrode 2 and TiCl 4 The liquid storage tank 3, the clamping fixture 1 is fixed at the center of the vacuum chamber 4, and the TiCl 4 The liquid storage tank 3 is connected with the vacuum chamber 4 through a stainless steel tube;
[0027] Wherein the clamping fixture 1 is composed of a tubular support 12 held up by three support rods 11, and four fixing holes 13 are evenly distributed on the upper end of the tube wall of the tubular support 12, and the tubular part 6 is fixed on the fixed hole 13 with screws. On the tubular support 12, the support rod 11 and the tubular support 12 are insulated by a ceramic body 14, the tubular support 12 is connected to the cathode of the DC pulse bias power supply 5, and the auxiliary electrode 2 is arranged on the The axis line of the clamping fixture 1 is connected to the anode of the DC...
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The invention relates to a device for preparing a tubular part inner hole coating. The device comprises a clamping fixture, an auxiliary electrode and a TiCl4 liquid storage tank. The clamping fixture is fixed in the center of a vacuum chamber. The TiCl4 liquid storage tank is connected with the vacuum chamber through a connecting pipe. The clamping fixture is composed of a tubular support supported by three supporting rods, the tubular support is connected with the negative electrode of a direct current pulsed bias power source, and the auxiliary electrode is arranged on the axis line of the clamping fixture and connected with the positive electrode of the direct current pulsed bias power source. Due to the fact that the positive electrode of the direct current pulsed bias power source is connected to the auxiliary electrode in the tubular center and the electric potential is suspended, glow discharging is limited to a tubular part inner hole, the problems that due to limit space, sheaths are overlapped, the ion energy is low and the coating binding force is not good are solved, the problems that entering plasmas from external diffusion are exhausted, the density of the plasmas is low, and the plasmas are distributed unevenly in the axial direction are solved, the density and evenness of the plasmas in a tube are improved, and efficient and axial even deposition is achieved.
Description
technical field [0001] The invention relates to a coating preparation device, in particular to a device for preparing a wear-resistant composite coating on the inner hole surface of a tubular part Background technique [0002] In recent years, wear-resistant coating materials and coating technologies used under high-temperature conditions that have been studied by various countries include refractory metals such as Ta, Mo, W, Re, Nb, Hf and their alloys, and ceramic body coatings such as TiB2 and ZrO2. , the coating structure is developing towards the direction of multi-layer multi-function, and its preparation technology includes laser coating, plasma flame coating, high-velocity oxygen-fuel thermal spraying, wire explosion spraying, and plasma-enhanced vapor deposition, among which vapor deposition is difficult to achieve The reliable deposition of melting, flame-retardant, and ablation-resistant materials has been widely used. Vapor deposition is a physical process such a...
Claims
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Inventor 吴护林孙彩云张隆平何庆兵陈海涛罗明波
Owner NO 59 RES INST OF CHINA ORDNANCE IND