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Micro-electro mechanical apparatus with interdigitated spring

一种微机电装置、指插式的技术，应用在微观结构装置、由彼此相对移动的元件组成的微观结构装置、测量装置等方向，能够解决飘移、共振器60大频率、加速度计灵敏度以及准确度降低等问题

Active Publication Date: 2014-09-03
IND TECH RES INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the accelerometer 50 is reduced in size, the sensitivity and accuracy of the accelerometer are reduced.
When the resonator 60 shrinks, it will cause the resonator 60 to have a large frequency drift

Method used

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  • Micro-electro mechanical apparatus with interdigitated spring
  • Micro-electro mechanical apparatus with interdigitated spring
  • Micro-electro mechanical apparatus with interdigitated spring

Examples

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Comparison scheme
Effect test

no. 1 example

[0122] Figure 7A is a schematic diagram of the MEMS device according to the first embodiment of the present invention. Figure 7B yes Figure 7A A partially enlarged schematic diagram of region A of the MEMS device. Please refer to Figure 7A , the microelectromechanical device 100 is, for example, a microelectromechanical angular velocity meter, which is suitable for sensing angular velocity, including a substrate SUB2, a first mass 110, a second mass 120, a moving electrode 130, a fixed electrode 140, a fixed seat 150 and a first finger The plug-in spring 160 and the second finger-type spring 112 . .

[0123] The second mass 120 is, for example, a frame structure, the first mass 110 is disposed in the second mass 120 , and the second mass 120 is connected to the first mass 110 . Here, a connection method that can be used is, for example, using the second finger spring 112 to connect the first mass block 110 and the second mass block 120 along the first axis A1. Altern...

no. 2 example

[0131] In addition to the micro-electro-mechanical devices suitable for sensing angular velocity described in the foregoing embodiments, in fact, the design of the present invention can also be applied to other types of micro-electro-mechanical devices. For example, Figure 8 A MEMS device such as a MEMS accelerometer using the aforementioned finger spring and bridge element is also shown, which is suitable for sensing acceleration.

[0132] like Figure 8 The shown MEMS device 200 includes a substrate SUB3 , a first mass 210 , a moving electrode 220 , a fixed electrode 230 , a fixing base 240 and a finger spring 250 . The moving electrode 220 is disposed on the first proof mass 210 along the first axis A1. The fixed electrodes 230 are disposed on the substrate SUB3 along the first axis A1 and form the sensing electrodes 260 with the moving electrodes 220 . There is a critical gap between the moving electrode 220 of the sensing electrode 260 and the fixed electrode 230 of t...

no. 3 example

[0137] Figure 9 Another MEMS device using the aforementioned finger-type spring and bridging element is further shown. More specifically, as Figure 9 The shown MEMS device 300 is, for example, a MEMS resonator, which includes a substrate SUB4 , a first mass 310 , a moving electrode 320 , a fixed electrode 330 , a fixing seat 340 and a finger spring 350 .

[0138] In this embodiment, the moving electrode 320 is arranged on the first proof mass 310 along the first axis A1, for example, and the fixed electrode 330 is arranged on the substrate SUB4 along the first axis A1, and is formed with the moving electrode 320. The sensing electrodes 360 and the driving electrodes 370 . There is a critical gap between the moving electrode 320 of the sensing electrode 360 ​​and the fixed electrode 330 of the sensing electrode 360 ​​, and the critical gap is formed between the moving electrode 320 and the fixed electrode 330 after an etching process. Furthermore, after the moving electrod...

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Abstract

A micro-electro mechanical apparatus with interdigitated spring including a substrate, at least one first mass, a movable electrode, a stationary electrode, an anchor and an interdigitated spring is provided. The movable electrode is disposed on the mass along an axial direction. The stationary electrode is disposed on the substrate along the axial direction, and the movable electrode and the stationary electrode have a critical gap there between. The interdigitated springs connects the mass and the anchor along the axial direction. The interdigitated spring includes first folded portions, first connecting portions, second folded portions, and second connecting portions. Each first folded portion includes two first spans and a first head portion. Each second folded portion includes two second spans and a second head portion. A width of the first span and a width of the second span are greater than the critical gap respectively.

Description

technical field [0001] The present invention relates to a micro-electro-mechanical device, and in particular to a micro-electro-mechanical device with a finger spring. Background technique [0002] In recent years, driven by related electronic products such as smart phones, tablet computers, and somatosensory game consoles, MEMS inertial sensors, such as accelerometers, gyroscopes, and oscillators, have been widely used in these electronic products. Its market demand has shown a substantial growth year by year. Under the multi-party competition in the market, the requirements for the quality and price of MEMS inertial sensor-related application products are also increasing. The current micro-electromechanical inertial sensor technology has become mature, and a miniaturized structural size with high on-axis sensitivity, low off-axis sensitivity and high process variation tolerance has been designed. The MEMS inertial sensor has become the current technical trend of the MEMS...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81B5/00B81B7/00G01P15/14G01C19/56
CPCG01P15/125G01P2015/0814G01P2015/0857
Inventor 林士杰黄肇达苏中源许郁文
Owner IND TECH RES INST
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