A micromechanical resonator and its manufacturing method
A micromechanical resonator and resonator technology, applied in electrical components, impedance networks, etc., can solve the problems of complex process, high cost, high packaging cost, etc., to simplify the manufacturing process, reduce the manufacturing cost, and reduce the feedback The effect of the pass effect
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[0083] In order to make the object, technical solution and advantages of the present invention clearer, the present invention will be described in further detail below in conjunction with specific embodiments and with reference to the accompanying drawings.
[0084] The present invention provides a micromechanical resonator and a manufacturing method thereof. The micromechanical resonator is a bulk resonant micromechanical resonator with a nanocapacitance gap, such as figure 1 As shown, the micromechanical resonator shown includes a bonded and sealed resonator die and a package lid, where the resonator die is as figure 2 As shown, it includes the resonant unit 1, the support center column 2 below the resonator unit, the input electrode 3 and the output electrode 4 on both sides of the resonator unit, the bias electrode 5 connected to the resonator center column, the electrode pressure pad 6 and the input or A tiny gap 16 between the output electrode and the resonant unit. Th...
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