A vacuum coating production line

A vacuum coating and production line technology, applied in vacuum evaporation coating, sputtering coating, ion implantation coating, etc., can solve the problems of inaccurate reception of substrate signals, increased gate thickness, elimination, etc.
CN104018130BActive Publication Date: 2016-02-03XIANGTAN HONGDA VACUUM TECH CO LTD

Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
XIANGTAN HONGDA VACUUM TECH CO LTD
Publication Date
2016-02-03

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Abstract

The invention discloses a vacuum coating production line, which includes a transfer line and a coating line, the coating line is connected to the transfer line; the transfer line includes a track, at least one transfer car and at least one film loading device, and the transfer car runs on the track , convey the film loading device through the transfer car; the coating line includes an inlet chamber, an inlet transition chamber, an inlet buffer chamber, a coating chamber, an outlet buffer chamber, an outlet transition chamber and an outlet chamber . Compared with the existing technology, the transmission line and the coating line are connected end to end to form a circular line, which saves floor space. The substrate transmission in the entire coating production line adopts intelligent control, which saves manpower and material resources and improves production efficiency. Each chamber in the coating line is based on Product demand is replaced or increased, and the entire coating production line adapts to various coating process requirements, prolongs the service life, and saves resources, so its application prospects are very broad.
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Description

technical field

[0001] The invention relates to the technical field of vacuum coating, in particular to a vacuum coating production line. Background technique

[0002] Vacuum coating technology first appeared in the 1930s, industrial applications began to appear in the 1940s and 1950s, and industrial mass production began in the 1980s. It has been widely used in electronics, aerospace, packaging, decoration, hot stamping and printing industries. Vacuum coating technology is a novel new technology of material synthesis and processing, and is an important part of the field of surface engineering technology. Vacuum coating technology is to use physical and chemical means to coat the solid surface with a layer of coating with special properties, so that the solid surface has wear resistance, high temperature resistance, corrosion resistance, oxidation resistance, radiation protection, electrical conductivity, magnetic conductivity, insulation and decoration. Many lamps are supe...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
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