Calibration method of 2×2 array light source scanning surface shape measuring optical system
A technology of an optical system and a calibration method, which is applied in the field of 2×2 array light source scanning type surface measurement optical system calibration, can solve the problems of measurement error, reduce the number of optical systems, surface measurement and fitting accuracy, etc., so as to improve the accuracy. Effect
Inactive Publication Date: 2016-08-24
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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[0003] However, these methods all increase the fine-tuning mechanism. When in use, the error and use of the fine-tuning mechanism itself will easily cause measurement errors and reduce the measurement and fitting accuracy of the optical system.
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[0023] The present invention will be further described in detail below in conjunction with the drawings and specific embodiments.
[0024] Such as image 3 Shown: A 2×2 array light source scanning type surface shape measurement optical system calibration method is characterized by including the following steps:
[0025] Step 1. After assembling the scanning surface profile measuring optical system, a calibration platform is arranged on the exit optical path of the scanning surface profile measuring optical system. The calibration platform can move the parallel light emitted by the scanning surface profile measuring optical system along the original path Parallel reflection back to the scanning surface shape measuring optical system;
[0026] Step 2: Start the laser 1 in the scanning surface profile measurement optical system, warm up for 30 minutes, the light emitted by the laser 1 is collimated by the collimating system 2 in turn, and then enters the beam expanding system 4 through...
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The invention discloses a 2×2 array light source scanning type surface shape measurement optical system calibration device and method, which is characterized in that it includes the following steps: assembling the scanning type surface shape measurement optical system and the calibration platform; starting the laser (1), four beams Parallel light is projected onto the calibration platform; adjusted on the calibration platform; the number of single driving steps of the calibration laser (1) is set according to the total number of driving steps; the data collection of one line of CCD is completed; the data collection of rows and columns of the entire area of CCD imaging is completed ; Complete the angle calibration within the dynamic range of the optical system test. The remarkable effect is that the method can improve the measurement efficiency of the original system while simplifying the system structure, and further improve the ability of the online detection of the surface shape.
Description
Technical field [0001] The invention belongs to the field of machine vision technology detection, and specifically relates to a calibration method of a 2×2 array light source scanning type surface shape measurement optical system. Background technique [0002] At present, the improved 2×2 scanning surface shape measurement optical system measurement methods include: optical path correction method and system calibration method. The optical path correction method adds a beam fine-tuning platform to the optical path to correct the angle deviation of the incident light during the scanning process so that the reference reference beam can return along the original path. This method has become an invention patent. [0003] However, these methods all add a fine-tuning mechanism. When in use, the error and use of the fine-tuning mechanism itself can also easily cause measurement errors, which reduces the accuracy of the optical system's surface shape measurement and fitting. Summary of the...
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IPC IPC(8): G01B11/24
Inventor 刘长春熊召陈海平袁晓东周海曹庭分叶海仙郑万国
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS