Probe station for chip total dose irradiation test
A technology of total dose irradiation and probe station, which is applied in the parts of electrical measuring instruments, measuring electricity, measuring devices, etc., can solve the problems of troublesome handling, large volume and large quality, achieve compact structure and avoid the influence of gaps , the effect of small size
Inactive Publication Date: 2014-09-03
58TH RES INST OF CETC
View PDF8 Cites 4 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0002] The probe station is mainly used in the semiconductor industry, the optoelectronic industry, and the testing of integrated circuit wafers. At present, the probe station has not been used in the field of microelectronic chip irradiation testing, mainly because the traditional probe station generally uses microscopes and probes. The microscope cannot be used in the irradiation test environment, and the combination of the microscope and the probe station is large in size and mass, and it is troublesome to carry, so it is impossible to enter the irradiation test chamber for irradiation test
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0022] The technical solutions of the present invention will be further described below in conjunction with the accompanying drawings and through specific implementation methods.
[0023] Such as Figure 1 to Figure 2 As shown, the probe station used for the chip total dose irradiation test includes a microscope 1 and a probe station body 2, the microscope 1 is fixed on a fixed bracket 12, and a display screen 11 is also fixed on the fixed bracket 12 , the display screen 11 is electrically connected with the microscope 1, the lower end of the microscope 1 is fixed with a circle of ring-shaped LED lights 13 for lighting, the fixed bracket 12 also includes a base 121, the probe station body 2 Placed on the base 121 below the microscope 1, the probe station body 2 includes an anti-vibration base 9 on which a base column 10 is fixed, and the tip of the probe 81 is fixed on the On the probe card 8, the probe card 8 is fixed on the abutment column 10 by the screws provided on both ...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention discloses a probe station for a chip total dose irradiation test. The probe station can be applied to the field of chip irradiation tests. The probe station for the chip total dose irradiation test comprises a microscope and a probe station body. The probe station body and the microscope are arranged in a split mode, and the probe station body is located below the microscope. The probe station body comprises an anti-vibration base station, a base station vertical column and a chip bearing station, wherein the base station vertical column is fixed to the anti-vibration base station, a probe clamp is fixed to the base station vertical column, and the chip bearing station is arranged below the probe clamp. A revolving platform, a vertical lifting mechanism and a horizontal moving mechanism are sequentially connected to the lower portion of the chip bearing station, wherein the lower end of the horizontal moving mechanism is fixed to the anti-vibration base station. The probe station body is compact in structure, small in size and low in weight, wherein the probe station body and the microscope are arranged in the split mode, and the probe station body can carry chips fixed to the probe station body to enter an irradiation test cavity for the irradiation test.
Description
technical field [0001] The invention relates to the technical field of microelectronic irradiation testing, in particular to a probe station for chip total dose irradiation testing. Background technique [0002] The probe station is mainly used in the semiconductor industry, the optoelectronic industry, and the testing of integrated circuit wafers. At present, the probe station has not been used in the field of microelectronic chip irradiation testing, mainly because the traditional probe station generally uses microscopes and probes. The microscope cannot be used in the radiation test environment if the table is fixed together, and the microscope and the probe table are combined to be large in size, heavy in weight, difficult to carry, and unable to enter the radiation test chamber for radiation test. Contents of the invention [0003] The object of the present invention is to provide a separate design of the probe station and the microscope, which can enter the irradiati...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Applications(China)
IPC IPC(8): G01R1/067
Inventor 顾吉吴建伟陈海波陈嘉鹏郑良晨徐海铭
Owner 58TH RES INST OF CETC