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Surface microstructure based high-accuracy length detection method

A detection method and high-precision technology, which is applied in the direction of measuring devices, instruments, and optical devices, etc., can solve the problems of high detection accuracy, large range, and inability to obtain measurement results on the surface, and achieve high-precision displacement detection. The effect of machining accuracy requirements

Inactive Publication Date: 2014-09-10
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0004] The present invention provides a high-precision length detection method based on surface microstructure in order to solve the problem that accurate measurement results cannot be obtained by using the existing technology to detect surfaces with no fixed start and stop clamping points, large range and high detection accuracy requirements

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  • Surface microstructure based high-accuracy length detection method

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Embodiment Construction

[0014] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0015] A high-precision length detection method based on surface microstructure, the specific implementation steps are as follows: figure 1 as shown,

[0016] Step 1, adjust the measuring equipment to be in a horizontal state, turn on the illumination light source 6 above the equipment to be tested, and start the first image acquisition system 10 and the second image acquisition system 12 .

[0017] Step 2, place the object 5 to be measured on the support structure 13, fix and level the object 5 to be measured with four anti-shake driving devices 4 clamped on the sides of the object to be measured. The object 5 to be measured may be a device that requires precise length measurement, such as a grating ruler.

[0018] Step 3, through the images obtained by the high-resolution first image acquisition system 10 and the second image acquisition system 12 located...

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Abstract

The invention provides a surface microstructure based high-accuracy length detection method and belongs to the high-accuracy length detection field. The surface microstructure based high-accuracy length detection method comprises adjusting a measurement device to be located in a horizontal state and opening a lighting source and an image acquisition system; placing an anti-shaking driving fixture for an object to be detected on the lateral side to be fixed and leveled; enabling a resolution test card to be closely attached to the surface of the object to be detected, adjusting the magnification of a first magnifier group and a second magnifier group to obtain appropriate resolution stripes of images and calculating and displaying the resolution through measurement software due to the fact that the appropriate view fields in respective camera system view fields can be simultaneously occupied by the surface microstructure of the object to be detected due to the transparent resolution test card; starting an image storage system, horizontally moving the object to be detected and displaying and storing data output from camera systems through the system; calculating and storing the displacement of the surface microstructure of the object to be detected between adjacent images through a calculation module according to parameters such as the resolution calibrated through the test card; achieving detection, stopping the image storage system and enabling a direct current motor and an image storage module to stop working.

Description

technical field [0001] The invention relates to a length detection method which utilizes the continuous change of the surface microstructure of the object to be detected during the displacement process, and belongs to the field of high-precision length detection. Background technique [0002] There are many methods for micro-displacement measurement: mechanical measurement method (vernier caliper, micrometer, etc.), optical lever method, optical interference method and sensor conversion method. These methods are widely used, but also have their inherent drawbacks. The mechanical measurement method uses the comparison between the object to be measured and the etalon to obtain the measurement result. It is necessary to give the measurement tool (vernier caliper, micrometer, etc.) a start and end point that can be clamped. The range is mostly within 30 cm, and the resolution can reach 10 microns; The lever method uses optical amplification to achieve distance measurement. It r...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/02
Inventor 朱小明王晓东
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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