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Processing Tool, Processing Device, And Processing Method

A processing device and fixture technology, which is applied to fine working devices, manufacturing tools, metal processing, etc., can solve problems such as thickness, groove, depth, and dimension errors, and achieve the effect of improving processing accuracy

Inactive Publication Date: 2014-09-24
KK TOSHIBA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0006] However, when an adhesive tape or a processing jig is provided between the workpiece and the holding part of the processing device, there is a possibility that the deviation in the thickness dimension of the adhesive tape or the processing jig becomes an error in the depth dimension of the groove after processing. cause of concern

Method used

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  • Processing Tool, Processing Device, And Processing Method
  • Processing Tool, Processing Device, And Processing Method
  • Processing Tool, Processing Device, And Processing Method

Examples

Experimental program
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Embodiment Construction

[0018] Embodiments will be described below with reference to the drawings.

[0019] In addition, in each drawing, the same components are assigned the same reference numerals, and detailed descriptions are appropriately omitted. In addition, arrows X, Y, and Z in each figure indicate three directions perpendicular to each other. For example, arrows X and Y indicate directions parallel to the surface 2 a of the base 2 , and Z indicates a direction perpendicular to the surface 2 a of the base 2 .

[0020] [First Embodiment]

[0021] figure 1 It is a schematic diagram for illustrating the processing jig 1 of the first embodiment.

[0022] figure 2 (a) and (b) are figure 1 The A-A line sectional view in.

[0023] image 3 It is a schematic diagram for illustrating another arrangement form of the detection unit 3 .

[0024] Figure 4 It is a schematic diagram for illustrating other arrangement forms of the insulating layer 4 .

[0025] Such as figure 1 As shown, a base ...

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PUM

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Abstract

According to one embodiment, a processing tool includes: a base; and a detector. The base has a region on which an object to be processed is retained on one side of the base. The detector has electrical conductivity, that includes a connecting portion provided at a periphery of the region where the object to be processed is retained, and a wiring portion connected to two ends of the connecting portion.

Description

[0001] This application is based on Japanese Patent Application 2013-059184 (filing date: 03 / 21 / 2013), from which it enjoys the benefit of priority. This application incorporates the entire content of this application by reference. technical field [0002] The following embodiments generally relate to a processing jig, a processing device, and a processing method. Background technique [0003] In machining such as electronic components and precision machined parts, groove machining that requires high machining accuracy is sometimes performed. [0004] In grooving requiring high machining accuracy, it is necessary to accurately know the position of the cutting edge of the insert. [0005] Therefore, it has been proposed to provide a detection unit that optically detects the position of the cutting edge of the insert, and to detect the position of the cutting edge of the insert at any time during the machining process. [0006] However, when an adhesive tape or a processing ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B28D7/04B28D5/02H01L21/301
CPCB24B7/00B26D5/005B24B19/02B24B49/10Y10T83/04Y10T83/145
Inventor 须藤正昭
Owner KK TOSHIBA