In-situ multifunctional probe testing device for photoelectric device
An optoelectronic device and multifunctional technology, which is applied in the field of in-situ multifunctional optoelectronic device probe testing devices, can solve the problems of lack of test results, complicated operation steps and high cost, and achieve objective and accurate test results and convenient and fast testing process. , the effect of improving test efficiency
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[0016] The specific implementation manners of the present invention will be further described in detail below in conjunction with the accompanying drawings.
[0017] Such as figure 1 As shown, a kind of in-situ multifunctional photoelectric device probe testing device designed by the present invention includes a sealed test chamber 1, a sample table 2, a probe array device 3, a wiring slot 4, a signal acquisition / transmission device 5, a photoelectric test Instrument 6, the third electronically controlled rotary lifting device 14 and the third controller 15; wherein, the sealed test chamber 1 is provided with a sealed door 7, and the sample table 2 is connected with the third electronically controlled rotary lifted device 14 and arranged in the sealed test chamber Inside the body 1, the third controller 15 is located outside the sealed test chamber 1, and the third controller 15 is connected to the third electronically controlled rotary lifting device 14 through wires; the pro...
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