A terahertz detector based on an optical antenna

Abstract

An optical antenna-based terahertz detector comprising optical antennas (104 and 105) made of a polysilicon material layer and a transistor or a field-effect transistor. The optical antennas (104 and 105) respectively are arranged at either end of a source electrode (101) and a drain electrode (102) of the transistor. The edges of the antennas (104 and 105) are distanced from the edges of a transistor gate electrode (103) at a pitch of 100-500 nm. The optical antennas are separated from the source terminal (101), the drain terminal (102), and the gate terminal (103) of the transistor via an oxide filler in a standard process. The optical antennas (104 and 105) and the transistor gate electrode (103) employ a same layer of polysilicon material, are doped via other processes for independent implementation, and have a thickness of 100-300 nm. An antenna structure of a dipole antenna or of a bowtie antenna is employed for the optical antennas (104 and 105), where the doping concentration of the polysilicon material is 1017-1020. A work solution of the terahertz detector of the optical antennas (104 and 105) is such that a direct-current offset voltage is applied to the transistor gate electrode (103), the source electrode (101) is grounded, the drain electrode (102) is suspended in mid air, and a signal voltage is outputted from the drain electrode (102).

Description

technical field [0001] The invention relates to the field of terahertz signal detection, and further relates to a detector structure using an optical antenna as a signal receiving component, which can achieve greater response. Background technique [0002] Terahertz is an electromagnetic wave with a frequency between infrared and microwave, which has many unique properties. Due to the high frequency of terahertz, its spatial resolution and temporal resolution are very high. At the same time, many non-metallic polar materials have little absorption of terahertz rays, so they can detect the internal information of the material. In addition, the terahertz electromagnetic energy is small and will not damage the material, and the resonance frequency of the vibration and rotation frequency of biomolecules is in the Terahertz band, so terahertz also has good application prospects in agriculture and food processing industries. At present, terahertz has had a profound impact on bro...

AI Technical Summary

Problems solved by technology

[0004] However, the above-mentioned detectors still use the traditional radio wave antenna made of metal, and the size of the antenna is at least 1 / 2 wavelength, which is relatively large, which is not conducive to the integration of the detector array.

At the same time, the gain of the radio wave antenna is limited, and the voltage response of the detector made of the radio wave antenna is limited

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