MEMS gas sensor with heat insulation groove and processing method thereof

A technology of a gas sensor and a processing method, which is applied to electric solid devices, semiconductor devices, processes for producing decorative surface effects, etc. The effect of cracking, avoiding damage to the micro-hot plate, and improving the service life

Active Publication Date: 2014-11-26
SUZHOU LEANSTAR ELECTRONICS TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] (2) The heat insulation effect is poor, and the air gap between the heat insulation tanks is large, resulting in faster heat loss, which affects the heat insulation effect

Method used

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  • MEMS gas sensor with heat insulation groove and processing method thereof
  • MEMS gas sensor with heat insulation groove and processing method thereof
  • MEMS gas sensor with heat insulation groove and processing method thereof

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Experimental program
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Effect test

Embodiment 1

[0059] See figure 1 , figure 2 , Embodiment 1 of the present invention discloses a MEMS gas sensor with a thermal insulation groove, comprising: a single crystal silicon substrate 1; a thermal insulation groove 2 formed on the upper surface of the single crystal silicon substrate 1 and has a certain depth , the thermal insulation groove 2 includes one or more groups of grooves, wherein each group of grooves includes a plurality of linear grooves arranged in parallel; the lower insulating layer 3 covers the thermal insulation groove 2 and the single crystal silicon substrate 1 The upper surface of the upper surface; the heating layer 4 is arranged on the upper surface of the lower insulating layer 3, and the heating layer 4 is located in the area directly above the thermal insulation trench 2; the upper insulating layer 5 covers the heating layer 4 the upper surface of the upper surface; the gas sensitive layer 9 is disposed on the upper surface of the upper insulating layer ...

Embodiment 2

[0111] See figure 1 , image 3 , Embodiment 2 of the present invention discloses a MEMS gas sensor with adiabatic groove, comprising: a single crystal silicon substrate 1; , the thermal insulation groove 2 includes one or more groups of grooves, wherein each group of grooves includes a plurality of linear grooves arranged in parallel; the lower insulating layer 3 covers the thermal insulation groove 2 and the single crystal silicon substrate 1 The upper surface of the upper surface; the heating layer 4 is arranged on the upper surface of the lower insulating layer 3, and the heating layer 4 is located in the area directly above the thermal insulation trench 2; the upper insulating layer 5 covers the heating layer 4 the upper surface of the upper surface; the gas sensitive layer 9 is disposed on the upper surface of the upper insulating layer 5 , and the gas sensitive layer 9 is located in the area directly above the heating layer 4 . The gas sensor also includes: a temperatu...

Embodiment 3

[0163] See figure 1 , Figure 4 , Embodiment 3 of the present invention discloses a MEMS gas sensor with a thermal insulation groove, comprising: a single crystal silicon substrate 1; a thermal insulation groove 2 formed on the upper surface of the single crystal silicon substrate 1 and has a certain depth , the thermal insulation groove 2 includes one or more groups of grooves, wherein each group of grooves includes a plurality of linear grooves arranged in parallel; the lower insulating layer 3 covers the thermal insulation groove 2 and the single crystal silicon substrate 1 The upper surface of the upper surface; the heating layer 4 is arranged on the upper surface of the lower insulating layer 3, and the heating layer 4 is located in the area directly above the thermal insulation trench 2; the upper insulating layer 5 covers the heating layer 4 the upper surface of the upper surface; the gas sensitive layer 9 is disposed on the upper surface of the upper insulating layer ...

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Abstract

The invention relates to the gas detection field, and discloses an MEMS gas sensor with a heat insulation groove and a processing method thereof. The MEMS gas sensor comprises a monocrystalline silicon substrate, a heat insulation groove, which is formed on the upper surface of the monocrystalline silicon substrate, has a certain depth, and comprises one or more groups of grooves, wherein each groove group comprises a plurality of parallel grooves; a lower insulation layer, which covers the heat insulation groove and the upper surface of the monocrystalline silicon substrate; and a heating layer and an upper insulation layer, which are arranged above the lower insulation layer. The heat insulation groove can stably support the lower insulation layer membrane, the heating plate and the upper insulation layer, and is capable of preventing the deformation of the lower insulation layer when the gas detector is operated at a high temperature so as to avoid the falling of the heating layer. At the same time, the groove surface of the heat insulation groove is covered by a silicon dioxide membrane, and thus the heat insulation performance of the groove is enhanced, so the energy consumption can be reduced, the detection sensitivity of the gas sensor is improved, and the service life of the gas sensor is also prolonged.

Description

technical field [0001] The invention relates to the technical field of gas detection, in particular to a MEMS gas sensor with an adiabatic groove and a processing method thereof. Background technique [0002] Air pollution and air quality are closely related to people's lives, and flammable and explosive gases are even more related to industrial production, national defense security, etc. Therefore, the detection of gases plays an extremely important role. At present, there are traditional large-scale detection equipment such as gas detection instruments based on mass spectrometry, energy spectrometry and chromatography, but these instruments are bulky and expensive, which limits their popularization and development. In recent years, some small gas sensors have also been developed. Among various gas sensors, semiconductor gas sensors are most widely used. It has the advantages of low power consumption, small size, good repeatability, high sensitivity, low cost, easy mass p...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N27/00B81B7/00B81C1/00
Inventor 沈方平张珽祁明锋刘瑞丁海燕谷文
Owner SUZHOU LEANSTAR ELECTRONICS TECH
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