Manganese titanium co-doped nitrogen germanate light-emitting film and preparation method thereof and electroluminescent device
A technology of luminescent film and germanate nitrogen, which is applied to the luminescent film of manganese-titanium co-doped germanate nitrogen and its preparation, in the field of electroluminescent devices
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Embodiment 1
[0028] Choose MgO, GeO 2 , Ge 3 N 4 , MnO 2 and TiO 2The powder, whose molar ratio is 0.96:0.5:0.5:0.03:0.01, is uniformly mixed and sintered at 1200°C to form a Φ50×2mm ceramic target, and the target is loaded into a vacuum chamber. Then, the glass substrate with ITO was ultrasonically cleaned with acetone, absolute ethanol and deionized water successively, treated with oxygen plasma, and placed in a vacuum chamber. The distance between the target and the substrate was set to 70mm. Use a mechanical pump and a molecular pump to evacuate the cavity to 6.0×10 -4 Pa, hydrogen and argon are used as the working gas, the gas flow rate is 20 sccm, the pressure is 1.0 Pa, and the hydrogen content is 5%. The substrate temperature was 500°C. The obtained samples were annealed in a 0.01 Pa vacuum furnace for 2 h at a temperature of 600 °C. get Mg 0.96 Ge 2 o 2 N 2 :0.03Mn 4+ ,0.01Ti 4+ Glowing film.
Embodiment 2
[0030] Choose MgO, GeO 2 , Ge 3 N 4 , MnO 2 and TiO 2 The powder, whose molar ratio is 0.985:0.5:0.5:0.01:0.005, is uniformly mixed and sintered at 1200°C to form a Φ50×2mm ceramic target, and the target is loaded into a vacuum chamber. Then, the glass substrate with ITO was ultrasonically cleaned with acetone, absolute ethanol and deionized water successively, treated with oxygen plasma, and placed in a vacuum chamber. The distance between the target and the substrate was set to 70mm. Use a mechanical pump and a molecular pump to evacuate the cavity to 6.0×10 -4 Pa, hydrogen and argon are used as the working gas, the gas flow rate is 25 sccm, the pressure is 1.0 Pa, and the hydrogen content is 3%. The substrate temperature was 550°C. The obtained samples were annealed in a 0.01 Pa vacuum furnace for 2 h at a temperature of 650 °C. get Mg 0.985 Ge 2 o 2 N 2 :0.01Mn 4+ ,0.005Ti 4+ Glowing film.
Embodiment 3
[0032] Choose MgO, GeO 2 , Ge 3 N 4 , MnO 2 and TiO 2 , the molar ratio of which is 0.92:0.5:0.5:0.05:0.03, after uniform mixing, sintering at 1200°C to form a Φ50×2mm ceramic target, and put the target into a vacuum chamber. Then, the glass substrate with ITO was ultrasonically cleaned with acetone, absolute ethanol and deionized water successively, treated with oxygen plasma, and placed in a vacuum chamber. The distance between the target and the substrate was set to 70mm. Use a mechanical pump and a molecular pump to evacuate the cavity to 6.0×10 -4 Pa, hydrogen and argon are used as the working gas, the gas flow rate is 23 sccm, the pressure is 2.0 Pa, and the hydrogen content is 1%. The substrate temperature was 400°C. The obtained samples were annealed in a 0.01 Pa vacuum furnace for 2 h at an annealing temperature of 500 °C. get Mg 0.92 Ge 2 o 2 N 2 :0.05Mn 4+ ,0.03Ti 4+ Glowing film.
[0033] figure 1 For the EL spectrogram of the luminescent film sampl...
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