Piezoresistive acceleration sensor and manufacturing method thereof

An acceleration sensor and piezoresistive technology, which is applied in the field of sensors, can solve the problems of low sensitivity of piezoresistive sensors, high requirements for packaging vacuum degree, and easy to be affected by air resistance, etc., to achieve simple structure, ensure accuracy, and vacuum degree The effect of request reduction

Inactive Publication Date: 2014-12-03
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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Problems solved by technology

[0007] The purpose of the present invention is to solve the problems of the existing piezoresistive sensors, such as low sensitivity, easy to be affected by air resistance, and high requirements for packaging vacuum.

Method used

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  • Piezoresistive acceleration sensor and manufacturing method thereof
  • Piezoresistive acceleration sensor and manufacturing method thereof
  • Piezoresistive acceleration sensor and manufacturing method thereof

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Embodiment Construction

[0033] The present invention will be further introduced below in conjunction with the accompanying drawings and embodiments.

[0034] figure 1 It is the top view of piezoresistive acceleration sensor of the present invention, as figure 1 As shown, the piezoresistive acceleration sensor of the present invention includes a supporting frame 1 , four snake-shaped elastic cantilever arms 2 , a piezoresistor 3 , a mass 4 , a damping hole 5 , a glass substrate 6 and a glass cover 7 . The support frame 1 supports the mass block 4 through a serpentine elastic cantilever arm, and the lower surface of the mass block 4 is higher than the lower surface of the support frame 1, which facilitates the mass block to move up and down under the action of inertia; the elastic cantilever arm 2 adopts a serpentine structure, which can The length of the beam is longer, the response to acceleration is more sensitive, and the sensitivity of the sensor can be effectively increased; the piezoresistor 3 ...

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Abstract

The invention provides a piezoresistive acceleration sensor and a manufacturing method thereof, and belongs to acceleration sensor devices in the field of sensors. The piezoresistive acceleration sensor comprises a supporting frame 1, an elastic cantilever arm 2, a piezoresistor 3, a mass block 4, a glass base 6 and a glass cover plate 7. The piezoresistive acceleration sensor is characterized in that the elastic cantilever arm 2 is an S-shaped elastic cantilever arm, and damping holes 5 which are arranged in an array mode are formed in the mass block. In the piezoresistive acceleration sensor, the elastic cantilever arm is of an S-shaped structure, a beam of the elastic cantilever arm can be made to be longer, response to acceleration is more sensitive, and the sensitivity of the sensor can be effectively increased; the damping holes are formed in the mass block, influence of air resistance can be effectively reduced, the accuracy is guaranteed, meanwhile, the requirements for the package vacuum degree of the sensor are reduced, and the production cost is reduced.

Description

technical field [0001] The invention relates to an acceleration sensor device in the sensor field, in particular to a piezoresistive acceleration sensor and a manufacturing method thereof. Background technique [0002] Micromechanical acceleration sensor is an important acceleration measurement device, which has the advantages of small size, light weight, fast response, and easy processing. It is widely used in automotive airbags, new toys, robots, industrial automation, mining, earthquake monitoring, and military navigation. , biomedicine, smart phones, smart wearable devices and other fields. The types of acceleration sensors mainly include piezoresistive, piezoelectric, resonant, tunnel current and capacitive. Among them, piezoresistive acceleration sensors are widely used due to their good dynamic response characteristics and output linearity, small size, and low power consumption. Used in various fields. [0003] The piezoresistive acceleration sensor is a sensor made...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/12
Inventor 陈超赵源王涛张龙胡晓马家锋
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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