Silicon-based MEMS array propeller and preparation method thereof

Abstract

The invention discloses a silicon-based MEMS array propeller and a preparation method thereof, and belongs to the technical field of micro propulsion. The propeller mainly comprises a nozzle array part and a circuit part respectively positioned on the upper and lower surfaces of a silicon slice, wherein the nozzle array consists of cavity arrays inwards recessed in the upper surface of the silicon slice; all the nozzles are filled with oil fuel; the circuit part consists of ignition resistor 2 arrays formed on the lower surface of the silicon slice through sputtering, ignition leads 3 and welding pads 4; and all ignition resistors 2 are corresponding to all the nozzles 1 in position. The invention further discloses a non-bonding process for preparing the silicon-based MEMS array propeller. The silicon-based MEMS array propeller has the following benefits: the nozzles and the ignition resistors are integrated on the upper and lower surfaces of a silicon material so that such procedures as bonding and assembly for a conventional MEMS propeller are not needed and the production efficiency of the propeller is largely improved; meanwhile, the problems of break and failure of an igniter due to the difference of thermal expansion coefficients of a glass layer and an ignition circuit in the prior art are solved; and the yield is improved.

Description

[0001] Field: [0002] The invention relates to a silicon-based MEMS array thruster and a preparation method thereof, which are used for position maintenance, attitude control and orbit adjustment of pico-satellites, and belong to the field of micro-propulsion technology and micro-electromechanical systems (MEMS). Background technique: [0003] The propulsion system is a key subsystem of most spacecraft, mainly used for position keeping, attitude control, gravitational compensation and orbit adjustment of the spacecraft. With the continuous maturity of micro-spacecraft, such as micro-satellites, nano-satellites, and pico-satellites, if micro-spacecraft are required to complete certain special tasks, such as satellite formation flight, these micro-spacecraft need to be equipped with propulsion systems. Because the traditional propulsion system is relatively large in size and mass, it cannot be applied to micro-spacecraft. Therefore, there is an urgent need for a micro-propulsio...

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is: in order to overcome the problem of igniter fracture and failure caused by the high bonding temperature of the existing micro propulsion technology, the present invention proposes a MEMS array propeller formed only by silicon material

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