Thin-film isolation gauge pressure sensor with built-in balance chamber

Abstract

The invention discloses a thin-film isolation gauge pressure sensor with a built-in balance chamber. By the aid of the thin-film isolation gauge pressure sensor, constantly unsolved major difficult problems of damage to sensors and influence on normal use of the sensors with open atmospheric reference pressure ends can be solved. The technical scheme includes that the atmospheric pressure automatic compensation balance chamber with a thin isolation film is arranged in a cavity which is arranged between the upper portion of a shell of a force sensing element and a connecting seat of an externally connected circuit board and is communicated with an atmospheric reference pressure end, the lower portion of a cavity body which is isolated by the thin isolation film is communicated with a pressure guide cavity body on the lower portion of the shell of the force sensing element to form a closed pressure guide cavity, and the upper portion of the cavity body is communicated with the atmospheric reference pressure end. The thin-film isolation gauge pressure sensor has the advantages that the thin-film isolation gauge pressure sensor is compact in structure, reasonable in design, easy to manufacture and safe and reliable in operation and can be isolated from external environments, atmospheric pressures can be automatically balanced, the sensor can be effectively prevented from being damaged by moisture condensation, corrosion and the like, accordingly, the stability of the sensor can be improved, the protection grade and the explosion-proof grade of the sensor can be upgraded, normal use of the sensor can be guaranteed, and the service life of the sensor can be prolonged.

Description

technical field [0001] The invention relates to a gauge pressure sensor, in particular to a film isolation gauge pressure sensor with a built-in balance chamber for automatic atmospheric pressure compensation. It can be widely used in marine environment (such as: tide observation, tsunami warning, marine scientific observation, ship safety and automation) and in media with strong acid and alkali corrosion, flammable and explosive media, dark and humid, low temperature media relative to the atmosphere, etc. Liquid level and pressure measurement and control in places. Background technique [0002] There are many kinds of gauge pressure sensors (silicon sapphire, diffused silicon, ceramic strain gauges, metal strain gauges, capacitors, etc.), and their shells and positive pressure terminals can achieve corrosion resistance and strict protection. However, the atmospheric pressure reference terminal on the connecting seat of the external circuit board in the above-mentioned gaug...

AI Technical Summary

Problems solved by technology

[0009] The purpose of the present invention is to provide a thin-film isolation gauge pressure sensor with a built-in balance chamber, which solves the long-standing problem of damage to the sensor and affecting its normal use that has always been insurmountable in the existing sensors with an open atmospheric reference pressure end , its compact structure, reasonable design, easy man...

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